Efficient Evaluation of Damping in Resonant MEMS
Author : Tsuyoshi Koyama
Publisher :
Page : 652 pages
File Size : 40,47 MB
Release : 2008
Category :
ISBN :
Alternative Energies and Efficiency Evaluation
Author : Muhammad Wakil Shahzad
Publisher : BoD – Books on Demand
Page : 328 pages
File Size : 26,55 MB
Release : 2022-11-30
Category : Technology & Engineering
ISBN : 1839698276
Book Description
Global energy demand is expected to grow 47% by 2050, with oil remaining the number one source of energy. Renewables make up 27% of the global energy mix, as predicted by the International Energy Agency (IEA). To achieve IEA’s 2050 Net Zero targets, the electricity sector needs to reduce global emissions by nearly three-quarters. Even though renewables installations are expanding quickly, there is not enough to satisfy a strong rebound in global electricity demand. This will result in a sharp rise in the use of fossil fuel electricity generation that risks pushing carbon dioxide emissions. This book presents a comprehensive overview of energy efficiency, alternative energy resources, and process optimization for future sustainability.
Resonant MEMS
Author : Oliver Brand
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 45,78 MB
Release : 2015-04-22
Category : Technology & Engineering
ISBN : 352767635X
Book Description
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
MEMS
Author : Vikas Choudhary
Publisher : CRC Press
Page : 481 pages
File Size : 27,80 MB
Release : 2017-12-19
Category : Medical
ISBN : 135183228X
Book Description
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Advances in Multiphysics Simulation and Experimental Testing of Mems
Author : Attilio Frangi
Publisher : Imperial College Press
Page : 504 pages
File Size : 31,5 MB
Release : 2008
Category : Technology & Engineering
ISBN : 1860948634
Book Description
This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.
Toward Inertial-Navigation-on-Chip
Author : Haoran Wen
Publisher : Springer Nature
Page : 134 pages
File Size : 44,65 MB
Release : 2019-09-14
Category : Technology & Engineering
ISBN : 3030254704
Book Description
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.
Piezoelectric MEMS
Author : Ulrich Schmid
Publisher : MDPI
Page : 177 pages
File Size : 31,20 MB
Release : 2018-07-10
Category : Technology & Engineering
ISBN : 3038970050
Book Description
This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
MEMS Mirrors
Author : Huikai Xie
Publisher : MDPI
Page : 217 pages
File Size : 12,66 MB
Release : 2018-05-04
Category : Technology & Engineering
ISBN : 3038428671
Book Description
This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines
Analysis and Design Principles of MEMS Devices
Author : Minhang Bao
Publisher : Elsevier
Page : 327 pages
File Size : 12,90 MB
Release : 2005-04-12
Category : Technology & Engineering
ISBN : 008045562X
Book Description
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.
Piezoelectric MEMS Resonators
Author : Harmeet Bhugra
Publisher : Springer
Page : 423 pages
File Size : 40,8 MB
Release : 2017-01-09
Category : Technology & Engineering
ISBN : 3319286889
Book Description
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
