Author : S. Krongelb
Publisher : The Electrochemical Society
Page : 318 pages
File Size : 19,12 MB
Release : 2009-05
Category : Science
ISBN : 1566777305
Book Description
This issue of ECS Transactions brings together the work of electrochemists, physicists, engineers, and device designers working in the area of magnetic thin-film technology. Topics include electrochemical and electroless plating systems, etching, process chemistry, tool design, process control, film nucleation and growth, structure of deposits, stress, physics and micromagnetics of films, thermal and magnetic annealing. Applications include the fabrication of data recording systems, sensors, microelectrochemical systems (MEMS) and other magnetic devices.