Fabrication and Characterization of Thin Film Pressure Sensors Using Novel Materials


Book Description

Thin-film pressure sensors have received widespread attention in recent times due to its ease of manufacture, characterization, and fatigue strength. Commercial fabrication of these sensors is inexpensive and compatible with the current manufacturing technologies. It has been found that the sensitivity of the flexible pressure sensor depends on the sensing pressure, the microstructural dispersion of nanoparticles, and the compatibility of the binder and the nanoparticles. The binder/particle dispersion should be such that it facilitates the formation of a greater number of conduction paths with a slight change in sensing pressure. The objective of this thesis includes the fabrication and characterization of a thin-film pressure sensor using different novel materials. The first material to be investigated was ZnO. ZnO thin-film materials that have received a great deal of attention due to its unique properties of being a semiconductor with wide bandgap and piezoelectric effect. The sensor characteristic of ZnO was compared with barium-titanate (BaTiO3) Gallium arsenic (GaAs) and Polyvinylidene fluoride (PVDF). The second material to be investigated was aluminum-doped zinc oxide (AZO). AZO has attracted a great deal of attention in many applications because of its nontoxicity, abundancy, and lower cost than other materials such as indium tin oxide (ITO). The AZO films were deposited on polyethylene (PE) substrates by a radiofrequency (rf) magnetron sputtering method. The piezoresistive sensor was tested for different pressures in vacuum and gage pressure conditions. The response characteristics indicated that resistance increased with the bending of the AZO layer in both compressive and tensile operation modes. The sensor characteristics exhibited that the AZO piezoresistive sensor can be used to measure ambient pressure quantitatively. This investigation indicated that AZO can be used as an alternative material for the fabrication of pressure sensors. Lastly, the materials that were investigated are carbon black/ Poly (vinylidene fluoride) (CB/PVDF), graphene/PMMA, and graphene/PVDF composites. The conductive CB/PVDF material was prepared by the wet-cast method and deposited into a flexible polyethylene (PE) substrate, while the graphene composites were prepared by the solvent cast method. The surface morphology, crystal structure, and material properties were studied using SEM and X-ray diffraction methods. Sensitivity, response time, and recovery time were analyzed by testing the sample in the deferent pressure range and vibration modes. The repeatability and reproducibility characteristics of the sensor were studied and found that the sensor exhibits excellent characteristics. The sensors were subjected to different loading/unloading pressures. The resistance of the sensor remained stable indicating that the sensor had a high degree of reproducibility.







Printed Flexible Sensors


Book Description

This book presents recent advances in the design, fabrication and implementation of flexible printed sensors. It explores a range of materials for developing the electrode and substrate parts of the sensors, on the basis of their electrical and mechanical characteristics. The sensors were processed using laser cutting and 3D printing techniques, and the sensors developed were employed in a number of healthcare, environmental and industrial applications, including: monitoring of physiological movements, respiration, salinity and nitrate measurement, and tactile sensing. The type of sensor selected for each application depended on its dimensions, robustness and sensitivity. The sensors fabricated were also embedded in an IoT-based system, allowing them to be integrated into real-time applications.




Fabrication and Characterization of Compound Semiconductor Sensors for Pressure, Gas, Chemical, and Biomaterial Sensing


Book Description

For biomaterials detection, the gate region was chemically modified with aminopropyl silane. As streptavidin was introduced to the biotin-functionalized gate region, the drain-source current showed a clear decrease of 4 [mu]A, which shows interaction between antibody and antigen. A Schottky diode was fabricated on a ZnO thin film and showed higher sensitivity to hydrogen (5 ppm). A single ZnO nanorod FET-based sensor was also demonstrated. Conductivity of the single nanorod sensor decreased linearly when the pH value of the solution varied from 2 to 12. The measured sensitivity was 8.5 nS/pH in the dark and 20 nS/pH under UV (365 nm) illumination, showing tremendous potential for sensing applications.




MEMS Pressure Sensors: Fabrication and Process Optimization


Book Description

MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.




A Refresher Guide to Thin Film Technology


Book Description

Thin films have significantly impacted the present modern era of technology and are considered the backbone of advanced applications in various fields, such as optical devices, environmental applications, telecommunications devices, energy storage, photovoltaic solar cells, integrated circuits, and others. The critical issue for all applications of thin films depends on their morphology and stability. The morphology of thin films strongly depends on the deposition techniques. Hence due to its multidisciplinary nature, a background in thin film technology requires skills such as chemistry, physics, electrical engineering, and materials science and engineering




Proceedings of the 11th Italian Conference on Sensors and Microsystems, Lecce, Italy, 8-10 February 2006


Book Description

This volume presents the new objectives of physics on self-organizing systems composed of multi-components, in order to create a new field and establish universal comprehension in physics. The book covers broad topics such as the thermodynamic time asymmetry in both transient and stationary nonequilibrium states, the seriousness of auxiliary conditions in physicochemical processes and biological systems, the quantum-classical and micro-macro interfaces which are familiar in mesoscopic physics, the purification scheme of quantum entanglement, topics on gamma-ray bursts, and the walking mechanism of single molecular motors.




Fabrication, Characterization and Application of PZT-silane Nano-composite Thin-film Sensors and Actuators


Book Description

Structural health monitoring (SHM) plays a very important role in improving structural safety, preventing catastrophic failures and lowering maintenance costs. Current sensing methods have some limitations, such as being bulky, heavy, or brittle, making them unsuitable for SHM of composite structures. In response to the need for a flexible, printable sensor with low curing temperature, a nano-composite thin-film with additive manufacturing capability that consists of numerous lead-zirconate-titanate (PZT) nanoparticles embedded in a silane matrix is proposed and studied in this dissertation. This dissertation includes fabrication, characterization, and applications of proposed thin-films with rigid or flexible substrates and parallel-plate or interdigitated electrodes as piezoelectric actuators and sensors. Fabrication includes the following steps: First, PZT nanoparticles with size distribution ranging from 300 to 800 nanometers, are fabricated via hydrothermal synthesis.The PZT nanoparticles are then suspended in a silane-based fluid to form a PZT ink that can be printed, sprayed, or drop-cast onto a substrate. The deposited PZT ink is subsequently cured at low temperature (e.g., 120 7́ŒC) to form the PZT-silane thin- film sensor. A similar ink and thin-film sensor using crushed bulk PZT is also fabricated for comparison. The aerosol-jet printed results for both inks are provided and compared. Characterizing the material properties of the PZT-silane thin films includes two parts: dielectric and piezoelectric characterization. The dielectric constant and loss are measured through an impedance analyzer. Piezoelectric properties are estimated by applying a calibrated force directly onto the film while an accurate, double-end charge amplifier isolates and records the tiny induced charge from background electrical noise. A finite element model is created to simulate the experimental setup in order to estimate the piezoelectric coefficient d33 from the measurements. A PZT-silane nano-composite thin film with parallel-plate electrodes, drop-cast near the fixed edge of a thin flexible cantilever beam made of kapton, has been successfully demonstrated as an actuator. Velocity measurements at the free end are found to be in synchronization with actuation signals when driving the PZT-silane thin film actuator near natural frequencies of the beam. To demonstrate its validity as a vibration sensor, a PZT-silane thin film is attached to a square aluminum plate supported by four pillars. The frequency response of the charge measured from the PZT thin-film sensor is in close agreement with the vibration measurements from a laser Doppler vibrometer. PZT ink is drop-cast on a flexible substrate in two electrode formats for evaluation: parallel-plate and interdigitated electrodes (IDEs). The parallel-plate electrode format is difficult to implement, because silver electrodes cannot be properly printed onto the PZT film with high conductivity and dimension accuracy. In contrast, IDEs inkjet-printed onto a polyethylene terephthalate (PET) film demonstrate excellent resolution and conductivity. Sinusoidal voltage applied over the IDEs drives PZT thin-film with IDEs device into resonance serving as a resonator. PZT thin films with printed IDEs are demonstrated as vibration and strain sensors. Vibration tests are carried out on wing and beam structures with small angle oscillations. PZT thin-film with IDEs are attached on one side of these test structures and commercially acquired foil strain gauges on the other side for comparison and characterization. Strain and charge frequency domain measurements are recorded and amplitude peaks correlate to structural vibration frequencies. PZT-IDE sensor outputs at wing/beam oscillation frequency are found to increase with vibration amplitude and charge responses are approximately proportional to strain gauge outputs. This validates PZT-silane thin films with printed IDEs as strain sensors. The directional dependence of their sensing capability is demonstrated in theory, finite element analysis and experimentation. Two PZT-silane thin film devices with printed IDEs oriented 90 degrees apart show different sensitivities towards single-axis strain and experimentation proves PZT thin films with IDEs can distinguish strains in two dimensions.