Low-power Silicon-based Thermal Sensors and Actuators for Chemical Applications
Author : Elizaveta Vereshchagina
Publisher :
Page : 135 pages
File Size : 43,8 MB
Release : 2011
Category :
ISBN : 9789036533003
Author : Elizaveta Vereshchagina
Publisher :
Page : 135 pages
File Size : 43,8 MB
Release : 2011
Category :
ISBN : 9789036533003
Author : Vikas Choudhary
Publisher : CRC Press
Page : 481 pages
File Size : 48,76 MB
Release : 2017-12-19
Category : Medical
ISBN : 135183228X
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Author : Markus Graf
Publisher : Springer Science & Business Media
Page : 131 pages
File Size : 43,52 MB
Release : 2007-04-19
Category : Technology & Engineering
ISBN : 3540695621
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Author : Gerard Meijer
Publisher : John Wiley & Sons
Page : 404 pages
File Size : 18,59 MB
Release : 2008-11-26
Category : Technology & Engineering
ISBN : 9780470866924
With contributions from an internationally-renowned group of experts, this book uses a multidisciplinary approach to review recent developments in the field of smart sensor systems, providing complete coverage of all important system and design aspects, their building blocks and methods of signal processing. It examines topics over the whole range of sensor technology from the theory and constraints of basic elements, the applied techniques and electronic, up to the level of application-orientated issues. Developed as a complementary volume to ‘Smart Sensor Systems’ (Wiley 2008), which introduces the theoretical foundations, this volume focuses on practical applications, including: State-of-the-art techniques for designing smart sensors and smart sensor systems, with measurement techniques at system level, such as collaboration and trimming, and impedance-measurement techniques. Sensing elements and sensor systems for the measurement of mechanical quantities, and microarrays for DNA detection. Circuitdesign for sensor systems, such as the design of low-noise amplifiers, and measurement techniques at device level, such as dynamic offset cancellation and optical imagers. Implantable smart sensors for bio-medical applications and automotive sensors. A supplementary website hosts case studies and a solutions manual to the problems Smart Sensor Systems: Emerging Technologies and Applications will greatly benefit final year undergraduate and postgraduate students in the areas of electrical, mechanical and chemical engineering, and physics. Professional engineers and researchers in the microelectronics industry, including microsystem developers, will also find this a thorough and useful volume.
Author : Gerson A. S. Machado
Publisher : IET
Page : 1072 pages
File Size : 29,88 MB
Release : 1996
Category : Technology & Engineering
ISBN : 9780852968741
This book brings together innovative modelling, simulation and design techniques in CMOS, SOI, GaAs and BJT to achieve successful high-yield manufacture for low-power, high-speed and reliable-by-design analogue and mixed-mode integrated systems.
Author : Chandra Mohan Jha
Publisher : Springer
Page : 139 pages
File Size : 14,53 MB
Release : 2015-04-15
Category : Technology & Engineering
ISBN : 1493925814
This book is a comprehensive guide to both the fundamentals of thermal sensors and their advanced functions. Key topics include sensor materials, CMOS-compatible sensors, measurement capabilities, thermal management and manufacturing processes. The introductory chapter covers the basic principles of thermal sensors from the essentials of heat transfer to smart wireless sensors. Later chapters illustrate the wide range of thermal sensor uses, from microprocessor thermal sensing to energy converter applications. Modeling and simulation techniques are used to explain the future direction of the field. Designed for researchers and practitioners working with wireless sensors and thermal management, Thermal Sensors: Principles and Applications for Semiconductor Industries is a valuable reference to the benefits and challenges these sensors offer. Advanced-level students studying mechanical or electrical engineering and networks will also find the content useful.
Author : Benedetto Vigna
Publisher : Springer Nature
Page : 988 pages
File Size : 36,76 MB
Release : 2022-04-12
Category : Technology & Engineering
ISBN : 3030801357
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Author : Gerard C. M. Meijer
Publisher : CRC Press
Page : 328 pages
File Size : 28,70 MB
Release : 1994-10-27
Category : Art
ISBN :
Thermal Sensors is intended as a comprehensive and accessible reference for designers and users of thermal sensors. Many different physical quantities can be converted easily and accurately into temperature differences using thermal techniques. These temperature differences can be detected with temperature and temperature-difference sensors. In a thermal sensor the thermal converter and the temperature sensor are combined in a single accurate device. This book gives an overview and deals with the design aspects of thermal and temperature sensors, with an emphasis on sensors based on silicon technology. The temperature sensors described are based on the use of various types of sensitive elements, such as platinum resistors, thermistors and special integrated circuits. The thermal sensors described include flow, conductivity, infrared, vacuum, humidity and calorimetric sensors, and ac-dc converters, thus providing a comprehensive overview of all thermal sensors, with practical examples of each type.
Author : Ghenadii Korotcenkov
Publisher : CRC Press
Page : 418 pages
File Size : 18,30 MB
Release : 2016-01-05
Category : Science
ISBN : 1482264579
Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. For example, the pores and surface chemistry of the mater
Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 20,64 MB
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 0387257861
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.