Microcircuit Engineering 87


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Microcircuit Engineering 91


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The 17th International Conference on Microlithography focused on the present dynamic international development of microfabrication using lithography and the related technologies. Bringing together leading international experts in the microcosm of modern semiconductor technology, the 7 invited and 109 contributed papers give an ongoing overview of the latest trends in the fabrication and application of microstructures.







Microcircuit Engineering


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RLE Progress Report


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Process Engineering


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Microcircuit Engineering 89


Book Description

The 15th International Conference on Microlithography and related techniques was organised with awareness of the present dynamic international development of microlithography and of the related technologies. The five invited and 131 contributed papers presented in the volume attest to the success of the conference in bringing together leading international experts in the microcosm of modern semiconductor technology to discuss the fascinating interrelations between scientific progress and technical applications.




Electronic Engineering


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