Physics and Technology of High-k Gate Dielectrics I
Author : Samares Kar
Publisher :
Page : 330 pages
File Size : 27,28 MB
Release : 2003
Category : Science
ISBN :
Author : Samares Kar
Publisher :
Page : 330 pages
File Size : 27,28 MB
Release : 2003
Category : Science
ISBN :
Author : Samares Kar
Publisher : The Electrochemical Society
Page : 676 pages
File Size : 23,90 MB
Release : 2007
Category : Dielectrics
ISBN : 1566775701
This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.
Author : Samares Kar
Publisher : The Electrochemical Society
Page : 565 pages
File Size : 45,63 MB
Release : 2006
Category : Dielectrics
ISBN : 1566775035
This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.
Author : S. Kar
Publisher : The Electrochemical Society
Page : 550 pages
File Size : 21,36 MB
Release : 2008-10
Category : Dielectrics
ISBN : 1566776511
The issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, novel and still higher permittivity dielectric materials, CMOS processing with high-K layers, metals for gate electrodes, interface issues, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.
Author : Samares Kar
Publisher : The Electrochemical Society
Page : 512 pages
File Size : 26,46 MB
Release : 2004
Category : Science
ISBN : 9781566774055
"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.
Author : Gang He
Publisher : John Wiley & Sons
Page : 560 pages
File Size : 15,87 MB
Release : 2012-08-10
Category : Technology & Engineering
ISBN : 3527646361
A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.
Author : D. Misra
Publisher : The Electrochemical Society
Page : 411 pages
File Size : 50,63 MB
Release :
Category :
ISBN : 1607688182
Author : S. Kar
Publisher : The Electrochemical Society
Page : 203 pages
File Size : 21,61 MB
Release : 2014
Category :
ISBN : 1607685450
Author : Howard Huff
Publisher : Springer Science & Business Media
Page : 723 pages
File Size : 18,10 MB
Release : 2005-11-02
Category : Technology & Engineering
ISBN : 3540264620
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology.
Author :
Publisher : Academic Press
Page : 2785 pages
File Size : 28,94 MB
Release : 2010-10-29
Category : Science
ISBN : 0123743966
From the Introduction: Nanotechnology and its underpinning sciences are progressing with unprecedented rapidity. With technical advances in a variety of nanoscale fabrication and manipulation technologies, the whole topical area is maturing into a vibrant field that is generating new scientific research and a burgeoning range of commercial applications, with an annual market already at the trillion dollar threshold. The means of fabricating and controlling matter on the nanoscale afford striking and unprecedented opportunities to exploit a variety of exotic phenomena such as quantum, nanophotonic and nanoelectromechanical effects. Moreover, researchers are elucidating new perspectives on the electronic and optical properties of matter because of the way that nanoscale materials bridge the disparate theories describing molecules and bulk matter. Surface phenomena also gain a greatly increased significance; even the well-known link between chemical reactivity and surface-to-volume ratio becomes a major determinant of physical properties, when it operates over nanoscale dimensions. Against this background, this comprehensive work is designed to address the need for a dynamic, authoritative and readily accessible source of information, capturing the full breadth of the subject. Its six volumes, covering a broad spectrum of disciplines including material sciences, chemistry, physics and life sciences, have been written and edited by an outstanding team of international experts. Addressing an extensive, cross-disciplinary audience, each chapter aims to cover key developments in a scholarly, readable and critical style, providing an indispensible first point of entry to the literature for scientists and technologists from interdisciplinary fields. The work focuses on the major classes of nanomaterials in terms of their synthesis, structure and applications, reviewing nanomaterials and their respective technologies in well-structured and comprehensive articles with extensive cross-references. It has been a constant surprise and delight to have found, amongst the rapidly escalating number who work in nanoscience and technology, so many highly esteemed authors willing to contribute. Sharing our anticipation of a major addition to the literature, they have also captured the excitement of the field itself in each carefully crafted chapter. Along with our painstaking and meticulous volume editors, full credit for the success of this enterprise must go to these individuals, together with our thanks for (largely) adhering to the given deadlines. Lastly, we record our sincere thanks and appreciation for the skills and professionalism of the numerous Elsevier staff who have been involved in this project, notably Fiona Geraghty, Megan Palmer and Greg Harris, and especially Donna De Weerd-Wilson who has steered it through from its inception. We have greatly enjoyed working with them all, as we have with each other.