Magnetic Electron Lenses


Book Description

No single volume has been entirely devoted to the properties of magnetic lenses, so far as I am aware, although of course all the numerous textbooks on electron optics devote space to them. The absence of such a volume, bringing together in formation about the theory and practical design of these lenses, is surprising, for their introduction some fifty years ago has created an entirely new family of commercial instruments, ranging from the now traditional transmission electron microscope, through the reflection and transmission scanning microscopes, to co lumns for micromachining and microlithography, not to mention the host of experi mental devices not available commercially. It therefore seemed useful to prepare an account of the various aspects of mag netic lens studies. These divide naturally into the five chapters of this book: the theoretical background, in which the optical behaviour is described and formu lae given for the various aberration coefficients; numerical methods for calculat ing the field distribution and trajectory tracing; extensive discussion of the paraxial optical properties and aberration coefficients of practical lenses, il lustrated with curves from which numerical information can be obtained; a comple mentary account of the practical, engineering aspects of lens design, including permanent magnet lenses and the various types of superconducting lenses; and final ly, an up-to-date survey of several kinds of highly unconventional magnetic lens, which may well change the appearance of future electron optical instruments very considerably after they cease to be unconventional.




Electron and Ion Optics


Book Description

The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.




Electron Optics


Book Description

This 1971 third edition of Dr Klemperer's Electron Optics is concerned primarily with the experimental aspects of electron optics.




Towards an Unambiguous Electron Magnetic Chiral Dichroism (EMCD) Measurement in a Transmission Electron Microscope (TEM)


Book Description

The intention of the ChiralTEM project (2004-2007) was the detection of electron (energy loss) magnetic chiral dichroism in a transmission electron microscope (TEM), in analogy to X-ray magnetic circular dichroism (XMCD). For the experiments, single-crystal electron transparent specimen's with magnetic induction perpendicular to the specimen's plane are required. In this thesis, different preparation techniques are evaluated regarding their usability to produce ideal specimen's for a verification of EMCD. After the demonstration of a dichroic measurement, an obvious way to prove the chiral effect is to invert the specimen's magnetization from parallel to antiparallel to the electron beam trajectory, leaving all other parameters of the experimental setup unchanged. For this case, one would - according to theory - expect a change in the dichroic signal measured. In the magnetic field of the objective lens of a 300kV TEM, typical ferromagnetic specimens will be close to saturation perpendicular to the specimen's plane. Reversing the current through the coils of the objective lens will then simply invert the magnetization of the specimen. In consequence, any magnetic chiral effect is expected to change sign. A switching unit for Tecnai microscopes has been constructed for save commutation of the lens currents. The direct sensitivity of the dichroic signal to the direction of the magnetization gives evidence to the magnetic origin of the effect.




Surface Microscopy with Low Energy Electrons


Book Description

This book, written by a pioneer in surface physics and thin film research and the inventor of Low Energy Electron Microscopy (LEEM), Spin-Polarized Low Energy Electron Microscopy (SPLEEM) and Spectroscopic Photo Emission and Low Energy Electron Microscopy (SPELEEM), covers these and other techniques for the imaging of surfaces with low energy (slow) electrons. These techniques also include Photoemission Electron Microscopy (PEEM), X-ray Photoemission Electron Microscopy (XPEEM), and their combination with microdiffraction and microspectroscopy, all of which use cathode lenses and slow electrons. Of particular interest are the fundamentals and applications of LEEM, PEEM, and XPEEM because of their widespread use. Numerous illustrations illuminate the fundamental aspects of the electron optics, the experimental setup, and particularly the application results with these instruments. Surface Microscopy with Low Energy Electrons will give the reader a unified picture of the imaging, diffraction, and spectroscopy methods that are possible using low energy electron microscopes.




Imaging Optics


Book Description

This comprehensive and self-contained text presents the fundamentals of optical imaging from the viewpoint of both ray and wave optics, within a single volume. Comprising three distinct parts, it opens with an introduction to electromagnetic theory, including electromagnetic diffraction problems and how they can be solved with the aid of standard numerical methods such as RCWA or FDTD. The second part is devoted to the basic theory of geometrical optics and the study of optical aberrations inherent in imaging systems, including large-scale telescopes and high-resolution projection lenses. A detailed overview of state-of-the-art optical system design provides readers with the necessary tools to successfully use commercial optical design software. The final part explores diffraction theory and concludes with vectorial wave propagation, image formation and image detection in high-aperture imaging systems. The wide-ranging perspective of this important book provides researchers and professionals with a comprehensive and rigorous treatise on the theoretical and applied aspects of optical imaging.










Vacuum Electronics


Book Description

Nineteen experts from the electronics industry, research institutes and universities have joined forces to prepare this book. It does nothing less than provide a complete overview of the electrophysical fundamentals, the present state of the art and applications, as well as the future prospects of microwave tubes and systems. The book does the same for optoelectronics vacuum devices, electron and ion beam devices, light and X-ray emitters, particle accelerators and vacuum interrupters.




Physical Principles of Electron Microscopy


Book Description

Scanning and stationary-beam electron microscopes are indispensable tools for both research and routine evaluation in materials science, the semiconductor industry, nanotechnology and the biological, forensic, and medical sciences. This book introduces current theory and practice of electron microscopy, primarily for undergraduates who need to understand how the principles of physics apply in an area of technology that has contributed greatly to our understanding of life processes and "inner space." Physical Principles of Electron Microscopy will appeal to technologists who use electron microscopes and to graduate students, university teachers and researchers who need a concise reference on the basic principles of microscopy.