Comprehensive Semiconductor Science and Technology


Book Description

Semiconductors are at the heart of modern living. Almost everything we do, be it work, travel, communication, or entertainment, all depend on some feature of semiconductor technology. Comprehensive Semiconductor Science and Technology, Six Volume Set captures the breadth of this important field, and presents it in a single source to the large audience who study, make, and exploit semiconductors. Previous attempts at this achievement have been abbreviated, and have omitted important topics. Written and Edited by a truly international team of experts, this work delivers an objective yet cohesive global review of the semiconductor world. The work is divided into three sections. The first section is concerned with the fundamental physics of semiconductors, showing how the electronic features and the lattice dynamics change drastically when systems vary from bulk to a low-dimensional structure and further to a nanometer size. Throughout this section there is an emphasis on the full understanding of the underlying physics. The second section deals largely with the transformation of the conceptual framework of solid state physics into devices and systems which require the growth of extremely high purity, nearly defect-free bulk and epitaxial materials. The last section is devoted to exploitation of the knowledge described in the previous sections to highlight the spectrum of devices we see all around us. Provides a comprehensive global picture of the semiconductor world Each of the work's three sections presents a complete description of one aspect of the whole Written and Edited by a truly international team of experts




Diamond Science and Technology, Vol. 1


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Semiconductor Quantum Science and Technology


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Semiconductor quantum science and technology is exploring the exciting and emerging prospects of integrating quantum functionality on semiconductor platforms to convert current information technology into quantum information technology. The past twenty years have led to incredible advances in this field. This book brings together the leading scientists who present the main achievements and challenges by reviewing and motivating the state-of-the-art at a tutorial level. The key challenges include creating quantum-light sources, quantum information processing via strong light-matter interaction, discovering new quantum materials as well as quasiparticles, and determining new quantum spectroscopic methodologies for superior control of quantum phenomena. As an important step, integration of these solutions on a semiconductor chip is discussed, and outlook for the future of semiconductor quantum science and technology is given. Leading experts present their vision on semiconductor quantum science and technology All aspects needed to realize semiconductor quantum science and technology are explained Quantum semiconductors from overviewed a tutorial introduction to the state-of-the-art




Ferroelectrics, Vol. 1


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CONTENTS Preface, XI List of Contributors, XIII Part I. REPORTS. Materials Parameters Determining the Performance of 3-3 Piezocomposites C.R. Bowen, A. Perry, R. Stevens, and S. Mahon.............................................. 3 Dielectric Permittivity and Hysteresis of PZT Aerogels Stefan Geis, Jochen Fricke................................................................................ 23 Superfine Anomalies of the Cubic-Tetragonal Transition in the Perovskite-Type Ferroelectrics Detected by “mk-stabilized cell” Akira Kojima, Yukio Yoshimura, Hiroshi Iwasaki, and Ken-ichi Tozaki.......................................................................................... 33 NMR Study on m3h(seo4)2 (m: k, rb) Yasumitsu Matsuo, Keisuke Takahashi, and Seiichiro Ikehata............................. 51 Photovoltaic Effect in Pb(Zr,Ti)O3 (PZT)-Based Ceramics and Development for Photostrictor Application Kazuhiro Nonaka, Morito Akiyama, Chao-Nan Xu, Tsuyoshi Hagio, and Akira Takase.................................................................... 65 Novel Electronic Phase Transition in ii-vi Ferroelectric Semiconductor znO A. Onodera and H. Satoh................................................................................. 93 Brillouin Scattering Study of Structural Phase Transition in the kno3 Crystal Yasunari Takagi............................................................................................... 113 New Technologies for Future FeRAMs K. Uchiyama, M. Kazumura, Y. Shimada, T. Otsuki, N. Solayappan, V. Joshi, and C.A. Paz de Araujo............................................... 125 NANOCRYSTALLINE PEROVSKITE FILMS: FERROELECTRICS AND RELAXORS C. Ziebert, J.K. Krüger, H. Schmitt, A. Sternberg K.-H. Ehses, M. Marx................................................................................... 135 Part II. BRIEF REPORTS Studies of Ferroelectric Thin Film and Film-Based Device Processes via In Situ Analytic Techniques O. Auciello, S.K. Streiffer, G.B. Stephenson, J.A. Eastman, G. Bai, A.R. Krauss, J. Im, A.M. Dhote, C. Thompson, E.A. Irene, Y. Gao, A.H. Muller, M.J. Bedzyk, A. Kazimirov, D. Marasco, V.P. Dravid, A. Gruverman, S. Aggarwal, R. Ramesh, S.-H. Kim, A.I. Kingon, and C.B. Eom.................................................................................................. 155 The Spherical Random Bond – Random Field Model of Relaxor Ferroelectrics: Theory and Experiments R. Blinc, R. Pirc, B. Zalar, and A. Gregorovic.................................................... 159 Stabilization of Ferroelectricity in Quantum Paraelectrics by Isotopic Substitution A. Bussmann-Holder, H. Buttner, and A.R. Bishop............................................ 165 New Understanding of the Phases Transition Mechanism of Hydrogen-Bonded Ferroelectrics A. Bussmann-Holder, Naresh Dalal, Riqiang Fu, and Ricardo Migoni................... 167 Two Dimensional Ferroelectrics V.M. Fridkin, L.M. Blinov, S.P. Palto, S.G. Yudin, S. Ducharme, P.A. Dowben, and A.V. Bune.......................................................................... 169 Ferroelastic Twinning in Some Extremely Plastic Crystals Lyubov Kirpichnikova....................................................................................... 171 Investigation of the Anisotropy of srbi2ta2o9 and srbi2nb2o9 Through Epitaxial Growth J. Lettieri, M.A. Zurbuchen, Y. Jia, D.G. Schlom, S.K. Streiffer, and M.E. Hawley............................................................................................. 173 New Ideas in Relaxor Theory R.F. Mamin..................................................................................................... 179 Evaluation of Ferroelectric Domains in Lead Zirconate Titanate Ceramics by Poling Fields Toshio Ogawa.................................................................................................. 181 Metal-Organic Chemical Vapor Deposited Ceramic Thin Films for Future Memory Applications M. Schumacher, J. Lindner, F. Schienle, D. Burgess, P. Strzyzewski, M. Dauelsberg, E. Merz, and H. Juergensen............................... 185 Dynamic and Static Aspects of the Antiferroelectric Phase Transition in rb3h1-xdx(so4)2 Crystals: An 87rb-nmr Study Andreas Titze and Roland Boehmer.................................................................. 187 Key Word Index………………………………………………………………………. 189 Contents of FERROELECTRICS.Vol.2. Frontier in Science and Technology Series. List of Titles. FSRC BOOKS of ABSTRACTS in Science and Technology Conference Series. List of Titles. F S R C. A Brief Info.




My Passion


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Crystal and Epitaxial Growth


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Aerosols


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Chimie en microélectronique


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La microélectronique est un monde complexe dans lequel plusieurs sciences comme la physique, l’électronique, l’optique ou la mécanique, contribuent à créer des nano-objets fonctionnels. La chimie est particulièrement impliquée dans de nombreux domaines tels que la synthèse des matériaux, la pureté des fluides, des gaz, des sels, le suivi des réactions chimiques et de leurs équilibres ainsi que la préparation de surfaces optimisées et la gravure sélective de couches spécifiques. Au cours des dernières décennies, la taille des transistors s’est considérablement réduite et la fonctionnalité des circuits électroniques s’est accrue. Cette évolution a conduit à une interpénétration de la chimie et de la microélectronique exposée dans cet ouvrage. Chimie en microélectronique présente les chimies et les séquences utilisées lors des procédés de production de la microélectronique, des nettoyages jusqu’aux gravures des plaquettes de silicium, du rôle et de l’impact de leur niveau de pureté jusqu’aux procédés d’interconnexion des millions de transistors composant un circuit électronique. Afin d’illustrer la convergence avec le domaine de la santé, l’ouvrage expose les nouvelles fonctionnalisations spécifiques, tels que les capteurs biologiques ou les capteurs sur la personne.




Chemistry in Microelectronics


Book Description

Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.