Thin Film Dielectrics
Author : Frederick Vratny
Publisher :
Page : 669 pages
File Size : 35,12 MB
Release : 1969
Category : Dielectrics
ISBN :
Dielectric Films for Advanced Microelectronics
Author : Mikhail Baklanov
Publisher : John Wiley & Sons
Page : 508 pages
File Size : 28,96 MB
Release : 2007-04-04
Category : Technology & Engineering
ISBN : 0470065419
Book Description
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
Interlayer Dielectrics for Semiconductor Technologies
Author : Shyam P Muraka
Publisher : Elsevier
Page : 459 pages
File Size : 50,96 MB
Release : 2003-10-13
Category : Science
ISBN : 0080521959
Book Description
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.
Thin Films and Heterostructures for Oxide Electronics
Author : Satishchandra B. Ogale
Publisher : Springer Science & Business Media
Page : 416 pages
File Size : 47,31 MB
Release : 2005-11-21
Category : Technology & Engineering
ISBN : 0387260897
Book Description
Oxides form a broad subject area of research and technology development which encompasses different disciplines such as materials science, solid state chemistry, physics etc. The aim of this book is to demonstrate the interplay of these fields and to provide an introduction to the techniques and methodologies involving film growth, characterization and device processing. The literature in this field is thus fairly scattered in different research journals covering one or the other aspect of the specific activity. This situation calls for a book that will consolidate this information and thus enable a beginner as well as an expert to get an overall perspective of the field, its foundations, and its projected progress.
Thin Film Metal-Oxides
Author : Shriram Ramanathan
Publisher : Springer Science & Business Media
Page : 344 pages
File Size : 45,60 MB
Release : 2009-12-03
Category : Technology & Engineering
ISBN : 1441906649
Book Description
Thin Film Metal-Oxides provides a representative account of the fundamental structure-property relations in oxide thin films. Functional properties of thin film oxides are discussed in the context of applications in emerging electronics and renewable energy technologies. Readers will find a detailed description of deposition and characterization of metal oxide thin films, theoretical treatment of select properties and their functional performance in solid state devices, from leading researchers. Scientists and engineers involved with oxide semiconductors, electronic materials and alternative energy will find Thin Film Metal-Oxides a useful reference.
Low Dielectric Constant Materials for IC Applications
Author : Paul S. Ho
Publisher : Springer Science & Business Media
Page : 323 pages
File Size : 48,3 MB
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 3642559085
Book Description
Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for
Optical Properties of Thin Solid Films
Author : O. S. Heavens
Publisher : Courier Corporation
Page : 276 pages
File Size : 42,4 MB
Release : 1991-01-01
Category : Science
ISBN : 0486669246
Book Description
Authoritative reference treats the formation, structure, optical properties, and uses of thin solid films, emphasizing causes of their unusual qualities. 162 figures. 19 tables. 1955 edition.
Thin Film Processes
Author : John L. Vossen
Publisher : Elsevier
Page : 577 pages
File Size : 45,55 MB
Release : 2012-12-02
Category : Technology & Engineering
ISBN : 0323138985
Book Description
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.
The Materials Science of Thin Films
Author : Milton Ohring
Publisher : Academic Press
Page : 744 pages
File Size : 18,53 MB
Release : 1992
Category : Science
ISBN : 9780125249904
Book Description
Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.
Electrical Properties of Materials
Author : Laszlo Solymar
Publisher : OUP Oxford
Page : 461 pages
File Size : 26,93 MB
Release : 2009-10-22
Category : Electronic books
ISBN : 019157435X
Book Description
An informal and highly accessible writing style, a simple treatment of mathematics, and clear guide to applications, have made this book a classic text in electrical and electronic engineering. Students will find it both readable and comprehensive. The fundamental ideas relevant to the understanding of the electrical properties of materials are emphasized; in addition, topics are selected in order to explain the operation of devices having applications (or possible future applications) in engineering. The mathematics, kept deliberately to a minimum, is well within the grasp of a second-year student. This is achieved by choosing the simplest model that can display the essential properties of a phenomenom, and then examining the difference between the ideal and the actual behaviour. The whole text is designed as an undergraduate course. However most individual sections are self contained and can be used as background reading in graduate courses, and for interested persons who want to explore advances in microelectronics, lasers, nanotechnology and several other topics that impinge on modern life.
