Vacuum Technology. Standard Methods for Measuring Vacuum-Pump Performance. Turbomolecular Vacuum Pumps


Book Description

Vacuum pumps, Vacuum measurement, Pressure measurement (fluids), Volume measurement, Pumps, Flow measurement, Test equipment, Compression ratios, Mathematical calculations, Measurement characteristics, Vacuum engineering, Performance testing







Vacuum Technology. Standard Methods for Measuring Vacuum-Pump Performance. General Description


Book Description

Vacuum pumps, Pumps, Vacuum engineering, Performance testing, Vacuum measurement, Volume measurement, Flow measurement, Pressure measurement (fluids), Compression ratios, Test equipment, Measurement characteristics, Mathematical calculations










Vacuum Technology


Book Description

This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology.Comments from the press on the second edition:"A valuable reference work for undergraduate libraries...well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended." (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers..." (Physics Today)




Handbook of Vacuum Technology


Book Description

Dieses gut eingeführte Standardwerk deckt Theorie und Anwendungen der Vakuumtechnik ab und wurde für die aktualisierte Neuauflage vollständig überarbeitet. Das Buch fasst den aktuellen Wissensstand der Vakuumtechnik zusammen, angefangen bei den Grundlagen über Bauteile bis hin zu vollständigen Vakuumsystemen. Zahlreiche Beispiele und Abbildungen illustrieren unterstützten den Transfer von Theorie zu Praxis, und eine durchgängig einheitliche Notation und Symbolik erleichtert das Verständnis. Abgerundet wird das Buch durch einen nutzerfreundlichen Anhang mit Umrechnungstabellen, mathematischen Hilfsmitteln, Materialkonstanten, Gerätedaten und Normen.




Vacuum Technology and Applications


Book Description

Vacuum Technology and Applications reviews the most commonly encountered methods for the production, containment, and measurement of subatmospheric pressure. This book also outlines a number of very important applications of this technology. This text is organized into eight chapters and begins with a brief survey of the fundamental principles of vacuum technology. The succeeding chapters deal with the pumps used for the production of rough-medium and high-ultra-high vacua. These chapters specifically cover their principles, performance, and applications. These topics are followed by a discussion of the devices for residual gas analysis and partial pressure measurement. Other chapters consider the aspects of leak detection using He-specific mass spectrometer and the materials, components, and fabrication of vacuum devices. The final chapters explore the application of vacuum technology in critical areas of industrial activity, such as thin-film technology, semiconductor, metallurgy, and chemical industry. This book will prove useful to practicing mechanical, chemical, and design engineers.




A Users Guide to Vacuum Technology


Book Description

A USERS GUIDE TO VACUUM TECHNOLOGY Choose and understand the vacuum technology that fits your project’s needs with this indispensable guide Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind. For decades, A User’s Guide to Vacuum Technology has met this need, with a user-focused introduction to vacuum technology as it is incorporated into semiconductor, optics, solar sell, and other engineering processes. With an emphasis on otherwise neglected subjects and on accessibility to the secondary user of vacuum technology, it balances treatment of older systems that are still in use with a survey of the latest cutting-edge technologies. The result promises to continue as the essential guide to vacuum systems. Readers of the fourth edition of A User’s Guide to Vacuum Technology will also find: Expanded treatment of gauges, pumps, materials, systems, and best??operating practices Detailed discussion of cutting-edge topics like ultraclean vacuum and contamination control An authorial team with decades of combined research and engineering experience A User’s Guide to Vacuum Technology is essential for those entering emerging STEM programs, engineering professionals and graduate students working with a huge range of engineering technologies.




High-Vacuum Technology


Book Description

Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.