Book Description

Low power CMOS and embedded memory Foundry technology RF process, device and integration technology Stand alone memory DRAM, FLASH, emerging memories Advanced CMOS modules e g gate stack, strained Si, SiGe substrates, interconnect technology, etc Lithography directed self assembly, EUV, multiple patterning, etc Power and analog IC device and technology Advanced CMOS Ge, SiGe, III V process and devices Process and device modeling TFT and organic electronics MEMS, imagers and sensors Advanced manufacturing technology, yield, reliability and test 3D ICs and advanced packaging Photonics Energy scavenging technology