Book Description

Low power CMOS and embedded memory Foundry technology RF process, device and integration technology Standalone memory DRAM, FLASH, emerging memory technology Advanced process modules e g gate stack, junction, strain channel engineering, low R contact, low C spacer ILD, interconnect technology, ALE and selective deposition, etc Nanopatterning Multiple patterning, Directed Self Assembly, EUV, etc Power and analog IC device and technology Advanced CMOS process and devices Ge, SiGe, III V, FinFET, GAA, 2D materials 1D nanowires Material, Process and device modeling TFT and organic electronics MEMS, imagers and sensors Advanced manufacturing technology, metrology and yield Reliability physics, characterization and test Advanced packaging and 2 5D 3D Integration Photonics and Beyond CMOS Technology Energy harvesting technology Wearable and loE enabling technologies Neuromo