A Study of Metal-semiconductor Contacts to InP.
Author : T. Clausen
Publisher :
Page : 105 pages
File Size : 48,63 MB
Release : 1993
Category :
ISBN :
Author : T. Clausen
Publisher :
Page : 105 pages
File Size : 48,63 MB
Release : 1993
Category :
ISBN :
Author :
Publisher :
Page : 46 pages
File Size : 32,15 MB
Release : 1981
Category :
ISBN :
This report describes the research accomplished during the last twelve months of a 20-month program of research on metal contacts to the semiconductor indium phosphide (InP). The Schottky barrier energy phi sub B and the contact resistance r(c) were measured for several metal-InP structures and the electrical properties were correlated to the metallurgical properties obtained with Auger electron spectroscopy (AES). Separate measurement of phi sub B on both n-type and p-type InP was carried out using Al as the metal Electrode. Control samples of Al/GaAs and Al/Si diodes were fabricated simultaneously in order to evaluate fabrication procedures. The Al/InP diodes were rectifying and phi sub B(n) less than phi sub B(p), in agreement with our earlier work on Pd/InP diodes. Ohmic contacts to p-type InP were also investigated. The results of a study of a multilayered metal film consisting of Au and Be alloyed to the InP surface, are given. In was found that the Au/Be/p-InP structure when properly heat treated would produce ohmic behavior with r(c) = 0.001 ohm sq cm at a net doping of about 1.0 x 10 to the 17th power per cu cm and r(c) = 0.0002 ohm sq cm at 1.4 x 10 to the 18th power per cu cm. The Au/Be contact was relatively easy to apply but tight control over the Au/Be thickness ratio and heat-treatment cycle was found to be necessary. (Author).
Author : G. Y. Robinson
Publisher :
Page : 47 pages
File Size : 13,31 MB
Release : 1979
Category : Indium phosphide
ISBN :
This report describes the research accomplished during a 14-month program of research on metal-semiconductor contacts on indium phosphide. Emphasis was placed on fabrication and characterization of ohmic contacts to p- and n-type InP using the deposition of thin metallic layers and subsequent heat treatment at elevated temperatures. Extensive use of Auger electron spectroscopy (AES) was made in order to obtain depth-composition profiles of the thin-film structures. For contact to n-type InP, three thin-film systems were investigated: Au, Ni, and a composite layer of Ni/Au/Ge. The specific contact resistance (r sub c) of the Ni/Au/Ge/In system varied in a systematic manner with heat-treatment temperature, and a minimum value of r sub c of .00003 ohm-sq cm at 325 C was found for N(D) = 3 x 10 to the 16th power/cc. Several nickel germanide phases, detected by AES and X-ray diffraction, were formed during heat treatment and were found to affect r sub c. For contact to p-type InP, a film consisting of Au/Mg was investigated. For heat treatment of the Au/Mg/InP system above 350 C, r sub c decreased with increasing signs of alloying at higher temperatures. The smoothest surface was obtained at 446 C for 50 minutes with r sub c approx. 0.0001 ohm/sq cm for N(A) = 6 x 10 to the 17th power/cc.
Author : Vallivedu Janardhanam
Publisher : LAP Lambert Academic Publishing
Page : 144 pages
File Size : 13,20 MB
Release : 2011-01
Category :
ISBN : 9783844301281
Metal-semiconductor contacts are one of the most widely used rectifying contacts in semiconductor industry. Therefore, the fabrication of high quality Schottky contacts is essential to improve the performance of the device. InP is a material of particular interest for optoelectronic and high-speed electronic devices. In view of the important applications, the fabrication of Schottky contacts to InP is of vital importance. The contacts formed should have electrical and thermal stability with desired surface morphology. During the technological stages leading to the final device, InP substrates unavoidably undergo many thermal treatments involving rapid thermal annealing. This book includes the fabrication and characterization of Schottky contacts to InP formed with high temperature stable metals like ruthenium and molybdenum. The Schottky structures formed on InP are rapid thermal annealed and its effect on the electrical, structural properties and deep level defects are investigated. The results presnted in the book will be useful for those working in the field of semiconductor Schottky contact fabrication.
Author : Ender Hökelek
Publisher :
Page : 326 pages
File Size : 25,21 MB
Release : 1982
Category : Indium phosphide
ISBN :
Author : Winfried Mönch
Publisher : Springer Science & Business Media
Page : 302 pages
File Size : 38,28 MB
Release : 2012-12-06
Category : Science
ISBN : 9400906579
Interface and surface science have been important in the development of semicon ductor physics right from the beginning on. Modern device concepts are not only based on p-n junctions, which are interfaces between regions containing different types of dopants, but take advantage of the electronic properties of semiconductor insulator interfaces, heterojunctions between distinct semiconductors, and metal semiconductor contacts. The latter ones stood almost at the very beginning of semi conductor physics at the end of the last century. The rectifying properties of metal-semiconductor contacts were first described by Braun in 1874. A physically correct explanation of unilateral conduction, as this deviation from Ohm's law was called, could not be given at that time. A prerequisite was Wilson's quantum theory of electronic semi-conductors which he published in 1931. A few years later, in 1938, Schottky finally explained the rectification at metal-semiconductor contacts by a space-
Author : Yeou-Song Lee
Publisher :
Page : 318 pages
File Size : 47,96 MB
Release : 1990
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Author : 陳土培
Publisher : Open Dissertation Press
Page : pages
File Size : 39,70 MB
Release : 2017-01-27
Category :
ISBN : 9781374761254
This dissertation, "Studies of Metal - Semiconductor Contacts: Current Transport, Photovoltage, Schottky Barries Heights and Fermi Level Pinning" by 陳土培, Tupei, Chen, was obtained from The University of Hong Kong (Pokfulam, Hong Kong) and is being sold pursuant to Creative Commons: Attribution 3.0 Hong Kong License. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation. All rights not granted by the above license are retained by the author. DOI: 10.5353/th_b3123349 Subjects: Semiconductor-metal boundaries Photovoltaic power generation Diodes, Schottky-barrier Fermi surfaces
Author :
Publisher :
Page : 6 pages
File Size : 26,12 MB
Release : 1988
Category :
ISBN :
Since the last report a number of experiments have been carried out on metal-semiconductor interfaces and semiconductor heterostructures. The range of experimental techniques applied included low energy electron diffraction (LEED), X-ray photoemission spectroscopy (XPS), Raman scattering, and transport measurement, i.e. current-voltage (I-V) and capacitance-voltage (C-V) measurements. The system investigated most thoroughly within this project is Sb on InP(110). As mentioned in an earlier report this Sb/InP interface exhibits properties which makes it an ideal system to study the formation of Schottky barriers and also test the different theoretical models for this formation. The Raman and transport measurements were performed on both Sb/n-InP and Sb/p-InP. This work has been accepted for publication and preprints are included. Indium phosphides, Antimony. (MJM).
Author : Simon S. Cohen
Publisher : Academic Press
Page : 435 pages
File Size : 37,41 MB
Release : 2014-12-01
Category : Technology & Engineering
ISBN : 1483217795
VLSI Electronics Microstructure Science, Volume 13: Metal-Semiconductor Contacts and Devices presents the physics, technology, and applications of metal-semiconductor barriers in digital integrated circuits. The emphasis is placed on the interplay among the theory, processing, and characterization techniques in the development of practical metal-semiconductor contacts and devices. This volume contains chapters that are devoted to the discussion of the physics of metal-semiconductor interfaces and its basic phenomena; fabrication procedures; and interface characterization techniques, particularly, ohmic contacts. Contacts that involve polycrystalline silicon; applications of the metal-semiconductor barriers in MOS, bipolar, and MESFET digital integrated circuits; and methods for measuring the barrier height are covered as well. Process engineers, device physicists, circuit designers, and students of this discipline will find the book very useful.