Design and Fabrication of Mems-based, Vibration Powered Energy Harvesting Device Using Electrostatic Transduction


Book Description

Due to size effects, the microtechnologies that are used to manufacture micro-sensors, allowed a drastic reduction of electrical power consumption. This feature contributed to the emergence of the concept of autonomous sensors, which have the ability to take the energy needed for their operation from the environment where they are located. Among the different energy sources, our choice was made on ambient mechanical vibrations. The electromechanical conversion is done within a transducer integrated with a micromechanical structure. In this work, we have designed and fabricated an electrostatic transducer based on silicon-glass technology, which required the development of a dedicated deep etching process. The device was tested experimentally and we have obtained a conversion of mechanical energy into electrical energy, corresponding to a power of 61 nW, with a device whose surface area is only 66 mm2. This device is the first miniaturized silicon converter based on electrostatic transduction which does not use an electret.




Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester


Book Description

This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures – single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process.




Electrostatic Kinetic Energy Harvesting


Book Description

Harvesting kinetic energy is a good opportunity to power wireless sensor in a vibratory environment. Besides classical methods based on electromagnetic and piezoelectric mechanisms, electrostatic transduction has a great perspective in particular when dealing with small devices based on MEMS technology. This book describes in detail the principle of such capacitive Kinetic Energy Harvesters based on a spring-mass system. Specific points related to the design and operation of kinetic energy harvesters (KEHs) with a capacitive interface are presented in detail: advanced studies on their nonlinear features, typical conditioning circuits and practical MEMS fabrication.




Piezoelectric Energy Harvesting


Book Description

The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.




Design and Development of MEMS Based Guided Beam Type Piezoelectric Energy Harvester


Book Description

This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures - single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process. .




Energy Harvesting Technologies


Book Description

Energy Harvesting Technologies provides a cohesive overview of the fundamentals and current developments in the field of energy harvesting. In a well-organized structure, this volume discusses basic principles for the design and fabrication of bulk and MEMS based vibration energy systems, theory and design rules required for fabrication of efficient electronics, in addition to recent findings in thermoelectric energy harvesting systems. Combining leading research from both academia and industry onto a single platform, Energy Harvesting Technologies serves as an important reference for researchers and engineers involved with power sources, sensor networks and smart materials.




Springless Electromagnetic Vibration Energy Harvesters


Book Description

The abundance of environmental kinetic energy combined with advances in the electronics and MEMS industries have opened a window of opportunities for the design and fabrication of self-powered, battery independent, low-power electronic devices. Kinetic energy harvesting, the process that captures vibrations from the environment or surrounding systems and converts them into electrical power, o ers the prospects of unlimited power for such systems. Vibration energy harvesters (VEHs) are vibration-based micro-power generators that utilize mechanical oscillators to capture ambient vibration energy and convert it into electrical power using one of three main transduction mechanisms, electromagnetic, electrostatic, or piezoelectric. A key feature of VEHs is their ability to harvest maximum environmental vibration energy from low amplitude and low frequency vibrations from a wide spectrum of frequencies. Traditional VEHs use linear mechanical oscillators as their harvesting element and are tuned to harvest environmental vibrations at resonance frequency present within the application environment. These VEHs are usually designed to harvest energy from high frequency vibrations in a narrow band in the vicinity of the natural frequency of the mechanical oscillator, and outside this narrow band of frequencies their output power is signi cantly reduced. In environments where ambient vibrations are random and only available at low frequencies, conventional harvesters prove to be ine ective. Although such devices are capable of generating power from vibrations with frequencies close to their resonance frequency, the need for harvesters that can harvest energy from broadband vibration sources has become an interesting research topic in recent years. To overcome the limitations associated with traditional vibration energy harvesters, nonlinear phenomena, such as hardening and softening nonlinearities, magnetic levitation, and pact have been sought as a solution to broadband vibration energy harvesting. In this thesis we aim to address this challenge by investigating a new architecture of an electromagnetic vibration energy harvester, the electromagnetic \Springless" vibration energy harvester (SVEH). The new architecture di ers from traditional harvester as it uses a double-impact oscillator as its harvesting element as opposed to the linear model. Experimental results show that the new SVEH is capable of harvesting vibration energies with frequencies as low as 5Hz and amplitudes as low as 0.05 g in a frequency band of about 8Hz. The harvester generates maximum output power of 12 mWatt from vibrations with amplitude of 0.5 g and an optimal load of 3.6 ohms. Experimental results also show that the "nonlinear" center frequency of the harvester is not constant, as in the case of conventional harvesters, but depends on the amplitude and frequency of the external vibrations and whether the harvester is operated in the vertical or horizontal position. Experimental as well as the numerical frequency response curves of the SVEH also show the existence of hardening nonlinearity in the horizontal con guration and softening nonlinearity in the vertical con guration in the system. The hardening e ect allows harvesting of energy in the high frequency spectrum, about 25 Hz and a bandwidth of 7 Hz, while the softening e ect allows harvesting at the lower end of the frequency spectrum, which is around 5 Hz and a bandwidth of 8 Hz. Models of the SVEH in the vertical and horizontal con gurations were developed and nonlinear numerical and analytical methods were used to analyze the system to gain a deeper understanding of the system's behavior. The experimental data is then used to validate the models. The harvester's ability to harvest vibration energy from low frequency ( 25Hz) and low amplitude vibrations ( 0:5g) in a wide band ( 5Hz) is one of the unique features of the SVEH demonstrated in this work.




Micro Energy Harvesting


Book Description

With its inclusion of the fundamentals, systems and applications, this reference provides readers with the basics of micro energy conversion along with expert knowledge on system electronics and real-life microdevices. The authors address different aspects of energy harvesting at the micro scale with a focus on miniaturized and microfabricated devices. Along the way they provide an overview of the field by compiling knowledge on the design, materials development, device realization and aspects of system integration, covering emerging technologies, as well as applications in power management, energy storage, medicine and low-power system electronics. In addition, they survey the energy harvesting principles based on chemical, thermal, mechanical, as well as hybrid and nanotechnology approaches. In unparalleled detail this volume presents the complete picture -- and a peek into the future -- of micro-powered microsystems.




Development of MEMS Piezoelectronic Energy Harvesting Device for Wireless Condition Monitoring


Book Description

Microelectromechanical system (MEMS) vibration based energy harvesters have become significantly popular due to the growing demand of wireless sensor networks which need miniature, portable, long lasting and easily recharged sources of power. Usage of hazardous batteries is an unacceptable solution to power up the densely populated nodes due to their bulky sizes and high battery replacement cost. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. This work presents the design, simulation and fabrication of MEMS piezoelectric energy harvesters. The energy harvester was formed using Aluminium doped Zinc Oxide (AZO) cantilever beams with either Aluminium or Steel contacts. FEM simulation analysis was done to obtain the resonance frequency that provides maximum displacement of vibration and maximum output power. AZO/Steel and Al/AZO/Al/Si structures were successfully simulated, fabricated and experimentally measured. The fabricated AZO/Steel beam produced 4.2 Vs/m2 at the resonant frequency of 137.157 Hz. The Al/AZO/Al/Si beam operates at higher frequencies where it produced 3.2 V AC output voltages at resonance frequencies of 8.026 MHz. The proposed designs can be positioned on a gas turbine in power plant where at a critical vibration pattern it will generate power to activate a wireless sensor to caution for maintenance.




Micro and Nano Energy Harvesting Technologies


Book Description

Seeking renewable and clean energies is essential for releasing the heavy reliance on mineral-based energy and remedying the threat of global warming to our environment. In the last decade, explosive growth in research and development efforts devoted to microelectromechanical systems (MEMS) technology and nanowires-related nanotechnology have paved a great foundation for new mechanisms of harvesting mechanical energy at the micro/nano-meter scale. MEMS-based inertial sensors have been the enabler for numerous applications associated with smart phones, tablets, and mobile electronics. This is a valuable reference for all those faced with the challenging problems created by the ever-increasing interest in MEMS and nanotechnology-based energy harvesters and their applications. This book presents fundamental physics, theoretical design, and method of modeling for four mainstream energy harvesting mechanisms -- piezoelectric, electromagnetic, electrostatic, and triboelectric. Readers are provided with a comprehensive technical review and historical view of each mechanism. The authors also present current challenges in energy harvesting technology, technical reviews, design requirements, case studies, along with unique and representative examples of energy harvester applications.