Micromachined RF Switch With High Mechanical Reliability


Book Description

For this project, MESA (MEMS Early-Stage Analysis) was implemented to develop, "tri state multi-contact" switch. The switch was designed and processed to enhance mechanical and RF performance compare to the conventional RF MEMS switches. The switch was successfully fabricated using Metal MUMPs (Thick Metal deposition) process. It demonstrated 107 cycles of switching and 0.5 dB insertion loss. This RF MEMS can be further developed for future advanced RF communications systems for the space based and superior air applications.







MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications


Book Description

The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.




RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends


Book Description

The third project presents an RF MEMS switch developed on a low cost, flexible liquid crystal polymer (LCP) substrate. Its very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF Systems-On-a-Package (SOP). In chapter IV, a capacitive RF MEMS capacitive switch on an LCP substrate and its characterization and properties up to 40 GHz is presented for the first time.




Space Microelectronics Volume 2: Integrated Circuit Design for Space Applications


Book Description

This invaluable second volume of a two-volume set is filled with details about the integrated circuit design for space applications. Various considerations for the selection and application of electronic components for designing spacecraft are discussed. The basic constructions of submicron transistors and schottky diodes during the technological process of production are explored. This book provides details on the energy consumption minimization methods for microelectronic devices. Specific topics include: Features and physical mechanisms of the effect of space radiation on all the main classes of microcircuits, including peculiarities of radiation impact on submicron integrated circuits;Special design, technology, and schematic methods of increasing the resistance to various types of space radiation;Recommendations for choosing research equipment and methods for irradiating various samples;Microcircuit designers on the composition of test elements for the study of the effect of radiation;Microprocessors, circuit boards, logic microcircuits, digital, analog, digital–analog microcircuits manufactured in various technologies (bipolar, CMOS, BiCMOS, SOI);Problems involved with designing high speed microelectronic devices and systems based on SOS-and SOI-structures;System-on-chip and system-in-package and methods for rejection of silicon microcircuits with hidden defects during mass production.







Micromachined Radio Frequency (RF) Switches and Tunable Capacitors for Higher Performance Secure Communications Systems


Book Description

The purpose of this program is to develop and demonstrate MEMS for RF communications applications. The development activities focus on two MEMS devices: RF Switches and Tunable Capacitors. The application of these components to RF subsystems offers the potential for substantial improvements in a number of performance metrics, including size, weight, power consumption, and parts count. The advantages of MEMS technology will be demonstrated in this program by insertions of these devices into three military communication subsystems, corresponding to the three following technical tasks: 1) MEM Tunable Capacitor-based UHF Tracking Filter for the F-22 Antenna Interface Unit (AIU), 2) MEM RF Switch-based VHF Tracking Filter for the Comanche Helicopter AIU, and 3) MEM Tunable RF Filter (incorporating both MEM RF Switches and Tunable Capacitors) for the Receiver Pre-selector in the Joint Services ARC-210 Radio. Demonstration of MEMS RF switches in the space environment and the reliability assessment of RF Switches and Capacitors are also included.




RF MEMS Switches and Integrated Switching Circuits


Book Description

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.