Technologie hochintegrierter Schaltungen


Book Description

Im vorliegenden Buch wird die Technologie von hochintegrierten Schaltungen behandelt. Es werden zunächst sehr ausführlich und praxisnah die verschiedenen technologischen Verfahren und Einzelprozesse aus den Bereichen Lithographie, Schicht-, Ätz- und Dotiertechnik beschrieben. Danach folgen Beispiele für die Integration der Einzelprozesse zur Herstellung von CMOS-, Bipolar- und BICMOS-Schaltungen. Sowohl die Einzelprozesse als auch die Prozeßintegration sind anschaulich mit zahlreichen Bildern dargestellt. Das Buch vermittelt nicht nur eine gute Übersicht, sondern auch sehr detaillierte Informationen über den modernsten Stand der Technologie hochintegrierter Schaltungen, wie sie z.B. bei der Herstellung des dynamischen IMEGA-Bit-Speichers Anwendung findet. Darüber hinausgehende Entwicklungen, die in den Sub-Mikrometer-Bereich führen, werden ebenfalls beschrieben.










Nano and Micro Engineered Membrane Technology


Book Description

Nano and Micro Engineered Membrane Technology is about Nano and micro engineered membrane technology, an emerging new technological area in membrane technology. Potential applications cover a broad spectrum of science, such as micro and nano filtration, gas separation, optics and nanophotonics, catalysis, microbiology, controlled drug delivery, nanopatterning, micro contact printing, atomisation, cross flow emulsification, etc. A brief overview of filtration membranes and pore structures is presented in chapter 1 and in the subsequent chapter 2 an overview is presented of conventional micro perforation methods, like laser drilling, electroforming, precision etching etc. With micro engineering techniques (chapter 3), originating from the semiconductor industry, it is relatively easy to downscale and form submicron pores (down to 100 nm) using photolithographic methods, with e.g. contact masks and wafer steppers. In chapter 4 some elementary fluid mechanics related to fluid flow in conducts and single and multiple orifices is presented covering analytical methods as well as computational fluid dynamics. Much effort has been put in strength and maximum pressure load analysis (chapter 5) of perforated and unperforated membranes. New analytical expressions were obtained that were verified by a number of computer simulations and many experiments. A separate chapter (chapter 6) has been devoted to the pioneering work of manufacturing polymeric perforated membranes because of its potential future economical impact. Large scale microfiltration applications on e.g. skim milk and lager beer are presented in chapter 7, whereas in chapter 8 a micro scale Lab-on-a-Chip microfiltration/fractionation demonstrator is discussed. Nanotechnology and nano engineered membranes is the fascinating topic of chapter 9, with typical examples as nanopatterning, nanophotonics and nanomembrane technology. This book closes with novel pioneering applications on atomization (chapter 10) for deep pulmonary inhale and cross flow emulsification (chapter 11) for the manufacturing of e.g. functional foods and nano/micro emulsions. Overview on the implementation of nano and micro engineering techniques in membrane science; which is an upcoming new cross-road technology Demonstration of feasibility with respect to micro and nano filtration, gas separation, photonic structures, catalysis, microbiology, controlled drug delivery, nanopatterning, micro contact printing, atomisation and emulsification techniques Informative introductions with rules of thumb for fluid flow in micro channels, pressure strength of thin supported perforated and unperforated membranes, silicon micro machining techniques, membrane filtration technology, Rayleigh breakup and cross-flow emulsification




Advances in Solid State Physics


Book Description

Advances in Solid State Physics




Micromixers


Book Description

The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis. The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds. Micromixers is uniquely comprehensive, in that it deals not only with the problems that are directly related to fluidics as a discipline (aspects such as mass transport, molecular diffusion, electrokinetic phenomena, flow instabilities, etc.) but also with the practical issues of fabricating micomixers and building them into microsystems and lab-on-chip assemblies.With practical applications to the design of systems vital in modern communications, medicine and industry this book has already established itself as a key reference in an emerging and important field. The 2e includes coverage of a broader range of fabrication techniques, additional examples of fully realized devices for each type of micromixer and a substantially extended section on industrial applications, including recent and emerging applications. Introduces the design and applications of micromixers for a broad audience across chemical engineering, electronics and the life sciences, and applications as diverse as lab-on-a-chip, ink jet printing, pharmaceutical manufacturing and DNA analysis Helps engineers and scientists to unlock the potential of micromixers by explaining both the scientific (microfluidics) aspects and the engineering involved in building and using successful microscale systems and devices with micromixers The author's applied approach combines experience-based discussion of the challenges and pitfalls of using micromixers, with proposals for how to overcome them




ESD in Silicon Integrated Circuits


Book Description

* Examines the various methods available for circuit protection, including coverage of the newly developed ESD circuit protection schemes for VLSI circuits. * Provides guidance on the implementation of circuit protection measures. * Includes new sections on ESD design rules, layout approaches, package effects, and circuit concepts. * Reviews the new Charged Device Model (CDM) test method and evaluates design requirements necessary for circuit protection.




Rechnergestützter Entwurf hochintegrierter MOS-Schaltungen


Book Description

Dieses Buch enthält die notwendigen Grundlagen für das Verständnis und den Entwurf hochintegrierter MOS-Schaltungen. Obwohl der rechnerunterstützte Entwurf dabei im Vordergrund steht, werden die notwendigen physikalischen und elektrotechnischen Grundbegriffe nicht vernachlässigt. Auch wird die Herstellung integrierter Schaltungen kurz angesprochen, da ein gewisses produktionstechnisches Verständnis für den Entwurf notwendig ist. Damit ist dieses Buch weniger zur Erweiterung und Vertiefung der zu den angsprochenen Themen reichlich vorhandenen Spezialliteratur gedacht. Vielmehr sollen die notwendigen Grundlagen sowohl des Schaltungsentwurfs als auch der Entwurfsautomatisierung verständlich zusammengestellt werden, um den Leser in die Lage zu versetzen, auf dem Gebiet des Entwurfs hochintegrierter Schaltungen tätig zu werden und die Spezialliteratur zu verstehen. Der Leser lernt digitale MOS-Schaltungen in verschiedenen Schaltungstechniken auf der Schaltkreisebene verstehen und zu entwerfen. Es werden verschiedene Entwurfsstile vorgestellt und die geläufigen Methoden und Algorithmen für Layout-Erstellung detailliert beschrieben.