Book Description
A new process, Laser Photodeposition (based on surface photo-chemistry), has been demonstrated as means for localized material deposition. The spectroscopy, chemical kinetics and transport properties in adsorbate layers of metal alkyls and chlorides have been characterized. Surface-modification processes, based on reactions of monomolecular layers, have been demonstrated. The phenomenon of stimulated surface-plasma-wave scattering has been identified and shown widely important in laser/surface interactions. Applications have been demonstrated in microelectronics. (Author).