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Introductory MEMS

Author : Thomas M. Adams

Publisher : Springer Science & Business Media

Page : 447 pages

File Size : 11,47 MB

Release : 2009-12-08

Category : Technology & Engineering

ISBN : 038709511X

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Book Description

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.



Introductory MEMS

Author : Thomas M. Adams

Publisher : Springer

Page : 444 pages

File Size : 50,7 MB

Release : 2008-11-01

Category : Technology & Engineering

ISBN : 9780387560588

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Book Description

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.



An Introduction to Microelectromechanical Systems Engineering

Author : Nadim Maluf

Publisher : Artech House

Page : 312 pages

File Size : 12,2 MB

Release : 2004

Category : Technology & Engineering

ISBN : 9781580535915

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Book Description

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.





Microfabricated Systems and MEMS V

Author :

Publisher : The Electrochemical Society

Page : 278 pages

File Size : 45,79 MB

Release : 2000

Category : Technology & Engineering

ISBN : 9781566772860

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Book Description



MEMS Product Development

Author : Alissa M. Fitzgerald

Publisher : Springer Nature

Page : 282 pages

File Size : 29,24 MB

Release : 2021-03-16

Category : Technology & Engineering

ISBN : 3030617092

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Book Description

Drawing on their experiences in successfully executing hundreds of MEMS development projects, the authors present the first practical guide to navigating the technical and business challenges of MEMS product development, from the initial concept stage all the way to commercialization. The strategies and tactics presented, when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. MEMS Product Development illuminates what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.



Handbook of Mems for Wireless and Mobile Applications

Author : Deepak Uttamchandani

Publisher : Elsevier

Page : 640 pages

File Size : 10,30 MB

Release : 2013-08-31

Category : Technology & Engineering

ISBN : 0857098616

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Book Description

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. - Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications - Discusses wireless techniques and applications of wireless MEMS, including biomedical applications - Describes monitoring structures and the environment with wireless MEMS



A Guide to Hands-on MEMS Design and Prototyping

Author : Joel A. Kubby

Publisher : Cambridge University Press

Page : 195 pages

File Size : 29,57 MB

Release : 2011-08-25

Category : Technology & Engineering

ISBN : 1139498800

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Book Description

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.



Mems Packaging

Author : Yung-cheng Lee

Publisher : World Scientific

Page : 363 pages

File Size : 43,67 MB

Release : 2018-01-03

Category : Technology & Engineering

ISBN : 9813229373

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Book Description

MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices.This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability.



Mechatronics

Author : Robert H. Bishop

Publisher : CRC Press

Page : 466 pages

File Size : 47,73 MB

Release : 2017-12-19

Category : Technology & Engineering

ISBN : 1351836463

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Book Description

Mechatronics has evolved into a way of life in engineering practice, and it pervades virtually every aspect of the modern world. In chapters drawn from the bestselling and now standard engineering reference, The Mechatronics Handbook, this book introduces the vibrant field of mechatronics and its key elements: physical system modeling; sensors and actuators; signals and systems; computers and logic systems; and software and data acquisition. These chapters, written by leading academics and practitioners, were carefully selected and organized to provide an accessible, general outline of the subject ideal for non-specialists. Mechatronics: An Introduction first defines and organizes the key elements of mechatronics, exploring design approach, system interfacing, instrumentation, control systems, and microprocessor-based controllers and microelectronics. It then surveys physical system modeling, introducing MEMS along with modeling and simulation. Coverage then moves to essential elements of sensors and actuators, including characteristics and fundamentals of time and frequency, followed by control systems and subsystems, computer hardware, logic, system interfaces, communication and computer networking, data acquisition, and computer-based instrumentation systems. Clear explanations and nearly 200 illustrations help bring the subject to life. Providing a broad overview of the fundamental aspects of the field, Mechatronics: An Introduction is an ideal primer for those new to the field, a handy review for those already familiar with the technology, and a friendly introduction for anyone who is curious about mechatronics.