MEMS and MOEMS Technology and Applications


Book Description

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.




Optical MEMS, Nanophotonics, and Their Applications


Book Description

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.




Micro and Nanoelectronics Devices, Circuits and Systems


Book Description

The book presents select proceedings of the International Conference on Micro and Nanoelectronics Devices, Circuits and Systems (MNDCS-2021). The volume includes cutting-edge research papers in the emerging fields of micro and nanoelectronics devices, circuits, and systems from experts working in these fields over the last decade. The book is a unique collection of chapters from different areas with a common theme and will be immensely useful to academic researchers and practitioners in the industry who work in this field.







MEMS/NEMS Sensors


Book Description

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.




Endorobotics


Book Description

The book comprises three parts. The first part provides the state-of-the-art of robots for endoscopy (endorobots), including devices already available in the market and those that are still at the R&D stage. The second part focusses on the engineering design; it includes the use of polymers for soft robotics, comparing their advantages and limitations with those of their more rigid counterparts. The third part includes the project management of a multidisciplinary team, the health cost of current technology, and how a cost-effective device can have a substantial impact on the market. It also includes information on data governance, ethical and legal frameworks, and all steps needed to make this new technology available. Focuses on a new design paradigm for endorobots applications Provides a unique collection of engineering, medical and management contributions for endorobotics design Describes endorobotics, starting from available devices in both clinical use and academia




Portable Spectroscopy and Spectrometry, Technologies and Instrumentation


Book Description

Provides complete and up-to-date coverage of the foundational principles, enabling technologies, and specific instruments of portable spectrometry Portable Spectroscopy and Spectrometry: Volume One is both a timely overview of the miniature technologies used in spectrometry, and an authoritative guide to the specific instruments employed in a wide range of disciplines. This much-needed resource is the first comprehensive work to describe the enabling technologies of portable spectrometry, explain how various handheld and portable instruments work, discuss their potential limitations, and provide clear guidance on optimizing their utility and accuracy in the field. In-depth chapters—written by a team of international authors from a wide range of disciplinary backgrounds—have been carefully reviewed both by the editors and by third-party experts to ensure their quality and completeness. Volume One begins with general discussion of portable spectrometer engineering before moving through the electromagnetic spectrum to cover x-ray fluorescence (XRF), UV-visible, near-infrared, mid-infrared, and Raman spectroscopies. Subsequent chapters examine microplasmas, laser induced breakdown spectroscopy (LIBS), nuclear magnetic resonance (NMR) spectroscopy, and a variety of portable mass spectrometry instrument types. Featuring detailed chapters on DNA instrumentation and biological analyzers—topics of intense interest in light of the global coronavirus pandemic—this timely volume: Provides comprehensive coverage of the principles and instruments central to portable spectroscopy Includes contributions by experienced professionals working in instrument companies, universities, research institutes, the military, and hazardous material teams Discusses special topics such as smartphone spectroscopy, optical filter technology, stand-off detection, and MEMS/MOEMS technology Covers elemental spectroscopy, optical molecular spectroscopy, mass spectrometry, and molecular and imaging technologies Portable Spectroscopy and Spectrometry: Volume One is an indispensable resource for developers of portable instruments, civilian and government purchasers and operators, and teachers and students of portable spectroscopy. When combined with Volume Two, which focuses on the multitude of applications of portable instrumentation, Portable Spectroscopy and Spectrometry provides the most thorough coverage of the field currently available.




Principles of Microelectromechanical Systems


Book Description

The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: Statics/force and moment acting on mechanical structures in static equilibrium Static behaviors of structures consisting of mechanical elements Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations Fluid flow in MEMS and the evaluation of damping force acting on the moving structures Basic equations of electromagnetics that govern the electrical behavior of MEMS Combining the MEMS building blocks to form actuators and sensors for a specific purpose All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.