Microcircuit Engineering 83
Author : H. Ahmed
Publisher :
Page : 582 pages
File Size : 35,35 MB
Release : 1983
Category : Technology & Engineering
ISBN :
Author : H. Ahmed
Publisher :
Page : 582 pages
File Size : 35,35 MB
Release : 1983
Category : Technology & Engineering
ISBN :
Author :
Publisher :
Page : pages
File Size : 39,44 MB
Release :
Category :
ISBN :
Author : H. Ahmed
Publisher :
Page : 560 pages
File Size : 43,17 MB
Release : 1983
Category : Integrated circuits
ISBN :
Author :
Publisher :
Page : 594 pages
File Size : 16,78 MB
Release : 1984
Category : Integrated circuits
ISBN :
Author : A. Paoletti
Publisher : Elsevier Science & Technology
Page : 614 pages
File Size : 23,5 MB
Release : 1992
Category : Computers
ISBN : 9780444895097
The 17th International Conference on Microlithography focused on the present dynamic international development of microfabrication using lithography and the related technologies. Bringing together leading international experts in the microcosm of modern semiconductor technology, the 7 invited and 109 contributed papers give an ongoing overview of the latest trends in the fabrication and application of microstructures.
Author : H. Ahmed
Publisher : Elsevier Publishing Company
Page : 780 pages
File Size : 40,60 MB
Release : 1990
Category : Technology & Engineering
ISBN :
The 15th International Conference on Microlithography and related techniques was organised with awareness of the present dynamic international development of microlithography and of the related technologies. The five invited and 131 contributed papers presented in the volume attest to the success of the conference in bringing together leading international experts in the microcosm of modern semiconductor technology to discuss the fascinating interrelations between scientific progress and technical applications.
Author : A. Heuberger
Publisher :
Page : 594 pages
File Size : 13,99 MB
Release : 1985
Category : Computers
ISBN :
Author : National Technical Information Service
Publisher :
Page : pages
File Size : 21,52 MB
Release : 1984
Category : Integrated circuits
ISBN :
Author : H. Beneking
Publisher :
Page : 592 pages
File Size : 45,37 MB
Release : 1985
Category : Integrated circuits
ISBN :
Author : R.A. Levy
Publisher : Springer Science & Business Media
Page : 992 pages
File Size : 43,40 MB
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9400909179
The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia and industry who have come together to blend their expertise into a tutorial overview and cohesive update of this rapidly expanding field. A balance of fundamental and applied contributions cover the basics of microelectronics materials and process engineering. Subjects in materials science include silicon, silicides, resists, dielectrics, and interconnect metallization. Subjects in process engineering include crystal growth, epitaxy, oxidation, thin film deposition, fine-line lithography, dry etching, ion implantation, and diffusion. Other related topics such as process simulation, defects phenomena, and diagnostic techniques are also included. This book is the result of a NATO-sponsored Advanced Study Institute (AS!) held in Castelvecchio Pascoli, Italy. Invited speakers at this institute provided manuscripts which were edited, updated, and integrated with other contributions solicited from non-participants to this AS!.