Microfabricated and Nanofabricated Systems for MEMS/NEMS 12
Author : P. Hesketh
Publisher :
Page : pages
File Size : 24,26 MB
Release : 2016
Category :
ISBN : 9781607687344
Author : P. Hesketh
Publisher :
Page : pages
File Size : 24,26 MB
Release : 2016
Category :
ISBN : 9781607687344
Author : P. J. Hesketh
Publisher : The Electrochemical Society
Page : 131 pages
File Size : 30,21 MB
Release : 2008-10
Category : Science
ISBN : 1566776600
The papers included in this issue of ECS Transactions were originally presented in the symposium ¿Microfabricated and Nanofabricated Systems for MEMS/NEMS 8¿, held during the PRiME 2008 meeting of The Electrochemical Society, in Honolulu, Hawaii, from October 12 to 17, 2008.
Author : Electrochemical Society (Ecs)
Publisher :
Page : 123 pages
File Size : 23,30 MB
Release : 2009-02-04
Category : Technology & Engineering
ISBN : 9781605606651
Author : Zhuoqing Yang
Publisher : Springer Nature
Page : 312 pages
File Size : 20,88 MB
Release : 2021-10-12
Category : Technology & Engineering
ISBN : 303079749X
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Author : Sushanta K. Mitra
Publisher :
Page : 75 pages
File Size : 17,49 MB
Release : 2020
Category :
ISBN : 9781713819431
Author : Hans H. Gatzen
Publisher : Springer
Page : 537 pages
File Size : 31,6 MB
Release : 2015-01-02
Category : Technology & Engineering
ISBN : 3662443953
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Author : Sergey Edward Lyshevski
Publisher : CRC Press
Page : 461 pages
File Size : 50,62 MB
Release : 2018-10-03
Category : Technology & Engineering
ISBN : 1420040510
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.
Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 11,3 MB
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 0387257861
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author : A. Kholsa
Publisher : The Electrochemical Society
Page : 109 pages
File Size : 49,64 MB
Release : 2018-09-21
Category : Science
ISBN : 1607688638
Author : Marc J. Madou
Publisher : CRC Press
Page : 672 pages
File Size : 17,94 MB
Release : 2011-06-13
Category : Technology & Engineering
ISBN : 1420055194
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.