Micromachined Radio Frequency (RF) Switches and Tunable Capacitors for Higher Performance Secure Communications Systems


Book Description

The purpose of this program is to develop and demonstrate MEMS for RF communications applications. The development activities focus on two MEMS devices: RF Switches and Tunable Capacitors. The application of these components to RF subsystems offers the potential for substantial improvements in a number of performance metrics, including size, weight, power consumption, and parts count. The advantages of MEMS technology will be demonstrated in this program by insertions of these devices into three military communication subsystems, corresponding to the three following technical tasks: 1) MEM Tunable Capacitor-based UHF Tracking Filter for the F-22 Antenna Interface Unit (AIU), 2) MEM RF Switch-based VHF Tracking Filter for the Comanche Helicopter AIU, and 3) MEM Tunable RF Filter (incorporating both MEM RF Switches and Tunable Capacitors) for the Receiver Pre-selector in the Joint Services ARC-210 Radio. Demonstration of MEMS RF switches in the space environment and the reliability assessment of RF Switches and Capacitors are also included.




Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters


Book Description

Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters discusses radio frequency microelectromechanical systems (RF MEMS)-based control components and will be useful for researchers and R&D engineers. It offers an in-depth study, performance analysis, and extensive characterization on micromachined switches and phase shifters. The reader will learn about basic design methodology and techniques to carry out extensive measurements on MEMS switches and phase shifters which include electrical, mechanical, power handling, linearity, temperature stability, reliability, and radio frequency performance. Practical examples included in the book will help readers to build high performance systems/subsystems using micromachined circuits. Key Features Provides simple design methodology of MEMS switches and switching networks including SPST to SP16T switches Gives an in-depth performance study of micromachined phase shifters. Detailed study on reliability and power handling capability of RF MEMS switches and phase shifters presented Proposes reconfigurable micromachined phase shifters Verifies a variety of MEMS switches and phase shifters experimentally




RF MEMS Switches and Integrated Switching Circuits


Book Description

Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.




Micromachined RF Switch With High Mechanical Reliability


Book Description

For this project, MESA (MEMS Early-Stage Analysis) was implemented to develop, "tri state multi-contact" switch. The switch was designed and processed to enhance mechanical and RF performance compare to the conventional RF MEMS switches. The switch was successfully fabricated using Metal MUMPs (Thick Metal deposition) process. It demonstrated 107 cycles of switching and 0.5 dB insertion loss. This RF MEMS can be further developed for future advanced RF communications systems for the space based and superior air applications.




RF MEMS Switch Fabrication and Packaging


Book Description

RF (Radio Frequency) MEMS (Micro Electro Mechanical Systems) technology is the application of micromachined mechanical structures, controlled by electrical signals and interacting with signals in the RF range. The applications of these devices range from switching networks for satellite communication systems to high performance resonators and tuners. RF MEMS switches are the first and foremost MEMS devices designed for RF technology. A specialized method for fabricating microsturctures called surface micromachining process is used for fabricating the RF MEMS switches. Die level packaging using available surface mount style RF packages. The packaging process involved the design of RF feed throughs on the Alumina substrates to the die attachment, wire bonding and hermetic sealing using low temperature processes.




High-Q Tunable Capacitors and Multi-Way Switches Using Microelectromechanical Systems (MEMS) for Millimeter-Wave Applications


Book Description

The objective of this project was to design new, innovative microelectromechanical systems (MEMS) to create high-Q tunable capacitors and switches that were superior to the existing on/off switches. The concept was feasible; however, it was very challenging to design and/or process MEMS to meet specific requirements balancing mm-wave and electro -mechanical performance measures, such as quality factor (Q), capacitance range, switching complexity, dynamic response, and reliability. Therefore, we planned to conduct in-depth synthesis and analysis to develop representative, well-characterized, MEMS-based, high-Q turnable capacitors, switches, and their mm-wave modules. We have successfully demonstrated innovative RF MEMS switches and variable capacitors and the associated knowledge and technology. The devices and subsystems demonstrated have confirmed the great potential of RF MEMS. More importantly, the knowledge and technologies developed for the design, packaging, and reliability of RF MEMS will assist the industry to develop cost-effective, reliable RF MEMS to support the advancement of military systems. Five major accomplishments are summarized in this report.







RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends


Book Description

The third project presents an RF MEMS switch developed on a low cost, flexible liquid crystal polymer (LCP) substrate. Its very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF Systems-On-a-Package (SOP). In chapter IV, a capacitive RF MEMS capacitive switch on an LCP substrate and its characterization and properties up to 40 GHz is presented for the first time.




Microwave and RF Design


Book Description

"Microwave & RF Design: A Systems Approach, 2nd Edition is a comprehensive treatment of the subject for advanced undergrad and graduate students (as well as professionals), focusing on the systems and emphasizing design. Components are covered in depth, but always with the idea of how they fit into modern radio, radar, and sensor systems. Advanced components and design techniques are presented along with a thoroughly modern treatment of traditional microwave theory and techniques."--pub. desc.




Practical Guide to RF-MEMS


Book Description

Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages. Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.