Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 13,44 MB
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 0387257861
Book Description
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.