Ohmic Contacts to P-type Indium Phosphide
Author : Anthony Joseph Valois
Publisher :
Page : 94 pages
File Size : 21,59 MB
Release : 1981
Category : Ohmic contacts
ISBN :
Author : Anthony Joseph Valois
Publisher :
Page : 94 pages
File Size : 21,59 MB
Release : 1981
Category : Ohmic contacts
ISBN :
Author : G. Y. Robinson
Publisher :
Page : 47 pages
File Size : 35,65 MB
Release : 1979
Category : Indium phosphide
ISBN :
This report describes the research accomplished during a 14-month program of research on metal-semiconductor contacts on indium phosphide. Emphasis was placed on fabrication and characterization of ohmic contacts to p- and n-type InP using the deposition of thin metallic layers and subsequent heat treatment at elevated temperatures. Extensive use of Auger electron spectroscopy (AES) was made in order to obtain depth-composition profiles of the thin-film structures. For contact to n-type InP, three thin-film systems were investigated: Au, Ni, and a composite layer of Ni/Au/Ge. The specific contact resistance (r sub c) of the Ni/Au/Ge/In system varied in a systematic manner with heat-treatment temperature, and a minimum value of r sub c of .00003 ohm-sq cm at 325 C was found for N(D) = 3 x 10 to the 16th power/cc. Several nickel germanide phases, detected by AES and X-ray diffraction, were formed during heat treatment and were found to affect r sub c. For contact to p-type InP, a film consisting of Au/Mg was investigated. For heat treatment of the Au/Mg/InP system above 350 C, r sub c decreased with increasing signs of alloying at higher temperatures. The smoothest surface was obtained at 446 C for 50 minutes with r sub c approx. 0.0001 ohm/sq cm for N(A) = 6 x 10 to the 17th power/cc.
Author : Christopher James Helms
Publisher :
Page : 100 pages
File Size : 45,91 MB
Release : 1990
Category : Gallium arsenide semiconductors
ISBN :
Author : Moonho Park
Publisher :
Page : 134 pages
File Size : 11,5 MB
Release : 1993
Category :
ISBN :
Author : Electrochemical Society
Publisher :
Page : 372 pages
File Size : 22,95 MB
Release : 1969
Category : Electric contactors
ISBN :
Author : Ender Hökelek
Publisher :
Page : 326 pages
File Size : 37,27 MB
Release : 1982
Category : Indium phosphide
ISBN :
Author : Avishay Katz
Publisher : Artech House Publishers
Page : 472 pages
File Size : 43,89 MB
Release : 1992
Category : Science
ISBN :
Presents an integrated survey of the most recent research, engineering development and commercial application of indium phosphide and related materials. The book is tutorial in nature, rich in application-engineering detail and emphasizes the designing and implementing of practical devices.
Author : Ralph Powers Ruth
Publisher :
Page : 80 pages
File Size : 15,48 MB
Release : 1977
Category : Indium ores
ISBN :
Author : Rockwell International. Electronics Research Division
Publisher :
Page : 84 pages
File Size : 15,93 MB
Release : 1977
Category :
ISBN :
Author :
Publisher :
Page : 602 pages
File Size : 49,69 MB
Release : 2000
Category : Electrooptical devices
ISBN :