Radiofrequency Glow Discharges Used for Optical Emission Spectroscopy: An Experimental and Analytical Approach


Book Description

Glow discharge optical emission spectroscopy (GD-OES) is an analytical technique widely used for elemental and depth profiling analysis of materials 1. The technique is based on the analysis of the optical emission of atoms sputtered from the cathode and excited in the plasma. Radio frequency excitation of the glow discharge (RF-GD-OES) is developed for quantitative analysis of non-conductive samples. Capacitively coupled radio frequency discharges have been extensively studied both experimentally and theoretically over the past decade in the context of plasma processing for the microelectronics industry and thus these discharges are fairly well understood 2-3. The operating conditions used in RF-GDOES are, however, different than those standardly used in plasma processing, leading to a discharge behavior quite unusual and it is our aim to understand this behavior.




Glow Discharge Optical Emission Spectroscopy


Book Description

Glow discharge optical emission spectroscopy (GDOES) is an essential technique for the direct analysis of bulk solids, for elemental surface analysis and for the depth profiling of thin films and industrial coatings. The technique has shown rapid growth in numbers of instruments, in breadth of applications, in improved quantification in recent years and is now a recognised technique within the ISO, with two international standards. Glow Discharge Optical Emission Spectroscopy: A Practical Guide takes the reader on a journey through instrument operation, sample preparation, analysis, and reporting results. It follows two sets of samples through the whole process of analysis, brass samples for bulk analysis, and zinc-coated steel for depth profiling. Procedures are consistent with recent ISO standards and each step is loaded with hands-on tips and theoretical insight. The book also includes unique data tables on spectral interferences, molecular bands, self-absorption and relative sputtering rates. This book is designed for those using or managing GDOES instruments and for students interested in learning the technique from a hands-on perspective. It is also an invaluable aid to those considering the purchase of a GDOES instrument, or those using GDOES results, to understand in detail how the technique works and what is involved in maintaining the instrument and achieving high quality results.




Glow Discharge Plasmas in Analytical Spectroscopy


Book Description

This multi-author, edited volume includes chapters which deal with both basic and highly complex applications. Glow discharge devices are now being used in very novel ways for the analysis of liquids and gases, including molecular species detection and identification, an area that was beyond the perceived scope of applicability just ten years ago. It is expected that the next decade will see a growth in the interest and application of glow discharge devices far surpassing the expectations of the last century. Responding to the rapid growth in the field Includes both GD-MS and GD-AES In-depth coverage of applications Co-edited by the top names in the field in Europe and US, with high calibre contributions from around the world










Glow Discharge Optical Emission Spectrometry


Book Description

Glow Discharge Optical Emission Spectrometry (GD-OES) is rapidly becoming one of the most important techniques for the direct analysis of solids. This, the first book entirely devoted to the subject, represents the combined contributions of over 30 specialists from around the world. All contributors are active in the field and recognised internationally for their expertise and knowledge in GD-OES. The book begins with an introductory overview of the subjects, deals with the design of the instrument, its operation and analytical methods and describes in detail the complex plasma processes which occur inside the glow discharge source. The second part of the book is more practically orientated, showing the full range of uses for GD-OES from the bulk analysis of virtually any solid material to depth profiling within the first tens of micrometres of a variety of surfaces and coatings. Glow Discharge Optical Emission Spectrometry is intended for a wide audience of scientists, engineers and postgraduate students and will be a valuable and challenging reference work for both experienced users of the technique and newcomers alike.




Radio-Frequency Capacitive Discharges


Book Description

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.










Plasma Processing of Polymers


Book Description

Proceedings of the NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers, Acquafredda di Maratea, Italy, May 19-June 2, 1996