Reliability and Failure Analysis of RF-MEMS Switches for Space Applications
Author : Enrico Autizi
Publisher :
Page : pages
File Size : 44,77 MB
Release : 2011
Category :
ISBN :
Author : Enrico Autizi
Publisher :
Page : pages
File Size : 44,77 MB
Release : 2011
Category :
ISBN :
Author : EDFAS Desk Reference Committee
Publisher : ASM International
Page : 673 pages
File Size : 31,93 MB
Release : 2011
Category : Technology & Engineering
ISBN : 1615037268
Includes bibliographical references and index.
Author :
Publisher : ASM International
Page : 813 pages
File Size : 40,14 MB
Release : 2004-01-01
Category : Technology & Engineering
ISBN : 0871708043
For newcomers cast into the waters to sink or swim as well as seasoned professionals who want authoritative guidance desk-side, this hefty volume updates the previous (1999) edition. It contains the work of expert contributors who rallied to the job in response to a committee's call for help (the committee was assigned to the update by the Electron
Author : Robert Joseph Lesnick
Publisher :
Page : 94 pages
File Size : 32,59 MB
Release : 2002
Category :
ISBN :
Author :
Publisher :
Page : 19 pages
File Size : 49,59 MB
Release : 2005
Category :
ISBN :
For this project, MESA (MEMS Early-Stage Analysis) was implemented to develop, "tri state multi-contact" switch. The switch was designed and processed to enhance mechanical and RF performance compare to the conventional RF MEMS switches. The switch was successfully fabricated using Metal MUMPs (Thick Metal deposition) process. It demonstrated 107 cycles of switching and 0.5 dB insertion loss. This RF MEMS can be further developed for future advanced RF communications systems for the space based and superior air applications.
Author : Allyson L. Hartzell
Publisher : Springer Science & Business Media
Page : 300 pages
File Size : 11,68 MB
Release : 2010-11-02
Category : Technology & Engineering
ISBN : 144196018X
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
Author :
Publisher : ASM International
Page : 160 pages
File Size : 22,79 MB
Release : 2002-01-01
Category : Technology & Engineering
ISBN : 0871707691
Provides new or expanded coverage on the latest techniques for microelectronic failure analysis. The CD-ROM includes the complete content of the book in fully searchable Adobe Acrobat format. Developed by the Electronic Device Failure Analysis Society (EDFAS) Publications Committee
Author : Robert Osiander
Publisher : CRC Press
Page : 400 pages
File Size : 14,22 MB
Release : 2018-10-03
Category : Technology & Engineering
ISBN : 1420027743
The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.
Author : Naveen Kishore Karri
Publisher :
Page : 184 pages
File Size : 11,95 MB
Release : 2004
Category : Electric switchgear
ISBN :
"Radio Frequency (RF) Micro-Electro-Mechanical System (MEMS) switches have many advantages over semiconductor switches. Despite these advantages they are not implemented in reliability demanding space, defense and commercial applications because of reliability concerns. Although some failure modes have been identified so far, other failure modes are still under research. Electromigration, a well-known failure mechanism in interconnects, was recently recognized as a possible cause of failure in micro-switches. However, there have been no instances of electromigration studies in the literature. This thesis presents a preliminary study on the electromigration failure and its impact on the lifetime of MEMS switches. A simulation program that emulates the electromigration process was developed. Parametric studies were performed to study the impact of impact certain parameters on electromigration process. The combined effects of Joule heating and electromigration were analyzed. Unlike passivated interconnects, the micro-switch is cantilevered and suspended in an inert medium without encapsulation. The electromigration lifetime estimation program developed in this thesis is applicable to all such free structures. Joule heating has been demonstrated to be a key factor in the electromigration failure of micro-switches. Results showed that the electromigration process is very slow at the beginning. After a certain time, the resistance is found to increase exponentially, increasing the temperature of the strip drastically toward failure. The same trend is also observed in a gold micro-switch, but with much slower rate of electromigration degradation, indicating a longer lifetime"--Leaf iii.
Author : Osamu Tabata
Publisher : John Wiley & Sons
Page : 328 pages
File Size : 38,71 MB
Release : 2008-02-04
Category : Technology & Engineering
ISBN : 9783527314942
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.