Special Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (MEMS-2002), 20-24 January 2002, Las Vegas, NV, USA
Author : Y. B. Gianchandani
Publisher :
Page : 290 pages
File Size : 12,45 MB
Release : 2003
Category : Microelectromechanical systems
ISBN :