Special Issue of the Micromechanics Section of Sensors and Actuators Based on Contributions Revised from the Technical Digest of the Fifteenth IEEE International Conference on Micro Electro Mechanics Systems (MEMS-2002), 20-24 January 2002, Las Vegas, NV, USA
Author : J. E. Wood
Publisher :
Page : 290 pages
File Size : 45,8 MB
Release : 2003
Category :
ISBN :