Special Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Fourteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS - 2001), 21-15 January 2001, Interlaken, Switzerland
Author : Institute of Electrical and Electronics Engineers
Publisher :
Page : 6 pages
File Size : 36,89 MB
Release : 2002
Category :
ISBN :