Special Issue of the Micromechanics Section of Sensors and Actuators, Based on Contributions Revised from the Technical Digest of the Fourteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2001), 21-25 January 2001, Interlaken, Switzerland
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Page : 219 pages
File Size : 34,74 MB
Release : 2002
Category : Microelectromechanical systems
ISBN :