Special Issue of the Micromechanics Section of Sensors and Actuators Based on Contributions Revised from the Technical Digest of the Fourteenth IEEE International Workshop on Micro Electro Mechanics Systems (MEMS-2001), 21-25 January 2001, Interlaken, Switzerland
Author : J. E. Wood
Publisher :
Page : 220 pages
File Size : 47,93 MB
Release : 2002
Category :
ISBN :