Special Issue of the Micromechanics Section of Sensors and Actuators Based on Contributions Revised from the Technical Digest of the Thirteenth IEEE International Workshop on Micro Electro Mechanics Systems (MEMS-2000), Miyazaki, Japan, 23-27 January 2000
Author : J. E. Wood
Publisher :
Page : 174 pages
File Size : 23,63 MB
Release : 2001
Category :
ISBN :