Special Issue of the Micromechanics Section of Sensors and Actuators Based Upon Contributions Revised from the Technical Digest of the 27th IEEE International Conference on MICRO ELECTRO MECHANICAL SYSTEMS (MEMS-14; 26 - 30 January 2014, San Francisco, CA, USA)
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Page : 80 pages
File Size : 12,24 MB
Release : 2015
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