The Design, Fabrication, and Characterization of Silicon-germanium Optoelectronic Devices Grown by Molecular Beam Epitaxy


Book Description

In recent years, Ge and SiGe devices have been actively investigated for potential optoelectronic applications such as germanium solar cells for long wavelength absorption, quantum-dot intermediate band solar cells (IBSCs), quantum-dot infrared photodetectors (QDIPs) and germanium light-emitting diodes (LEDs). Current research into SiGe based optoelectronic devices is heavily based on nanostructures which employ quantum confinement and is at a stage where basic properties are being studied in order to optimize growth conditions necessary for incorporation into future devices. Ge and SiGe based devices are especially attractive due to ease of monolithic integration with current Si-based CMOS processing technology, longer carrier lifetime, and reduced phonon scattering. Defect formation and transformation was studied in SiGe layers grown on Si and Ge (100) substrates. The epitaxial layers were grown with molecular beam epitaxy (MBE) and characterized by X-ray measurements in order to study the accommodation of elastic strain energy in the layers. The accommodation of elastic strain energy specifies the amount of point defects created on the growth surface which may transform into extended crystalline defects in the volume of the layers. An understanding of crystalline defects in high lattice mismatched epitaxial structures is critical in order to optimize growth procedures so that epitaxial structures can be optimized for specific devices such as Ge based solar cells. Considering the optimization of epitaxial layers based on the structural transformation of point defects, Ge solar cells were fabricated and investigated using current-voltage measurements and quantum efficiency data. These Ge solar cells, optimized for long wavelength absorption, were fabricated to be employed in a bonded Ge/Si solar cell device. The doping of self-assembled Ge quantum dot structures grown on Si (100) was investigated using atomic force microscopy (AFM) and photoluminescence (PL) spectroscopy. This is of special interest for Ge quantum dots employed in active device structures where the effect of Ge dot and Si buffer layer doping on structural and luminescence properties must be well understood. Large Ge islands known as "superdomes" were fabricated by MBE and characterized by scanning electron microscopy (SEM), AFM, and Raman spectroscopy. These Ge nanostructures have the potential to become a direct material through band-structure modification by introducing moderate tensile strain into the Ge layer and band-filling. The results of this research on the growth, fabrication, and characterization of SiGe materials, structures, and devices may be useful for applications in the fields of energy, communication, computation, and remote sensing.




Silicon-Based Millimeter-Wave Devices


Book Description

A description of field-theoretical methods for the design and analysis of planar waveguide structures and antennas. The principles and limitations of transit-time devices with different injection mechanisms are covered, as are aspects of fabrication and characterization. The physical properties of silicon Schottky contacts and diodes are treated in a separate chapter, while two whole chapters are devoted to silicon/germanium devices. The integration of devices in monolithic circuits is explained together with advanced technologies, such as the self-mixing oscillator operation, before concluding with sensor and system applications.







Molecular Beam Epitaxy


Book Description

Molecular Beam Epitaxy (MBE): From Research to Mass Production, Second Edition, provides a comprehensive overview of the latest MBE research and applications in epitaxial growth, along with a detailed discussion and ‘how to’ on processing molecular or atomic beams that occur on the surface of a heated crystalline substrate in a vacuum. The techniques addressed in the book can be deployed wherever precise thin-film devices with enhanced and unique properties for computing, optics or photonics are required. It includes new semiconductor materials, new device structures that are commercially available, and many that are at the advanced research stage. This second edition covers the advances made by MBE, both in research and in the mass production of electronic and optoelectronic devices. Enhancements include new chapters on MBE growth of 2D materials, Si-Ge materials, AIN and GaN materials, and hybrid ferromagnet and semiconductor structures. Condenses the fundamental science of MBE into a modern reference, speeding up literature review Discusses new materials, novel applications and new device structures, grounding current commercial applications with modern understanding in industry and research Includes coverage of MBE as mass production epitaxial technology and how it enhances processing efficiency and throughput for the semiconductor industry and nanostructured semiconductor materials research community




'Molecular Beam Epitaxial Growth, Characterization, and Devices of Modulated Semiconductor Structures'.


Book Description

Substrate stabilized metastable single crystal germanium (1-x) stannide (x) films can be grown by molecular beam epitaxy (MBE). We have grown for the first time single crystal Ge (1-x) Sn(x) alloys on lattice matched gallium antimonide (with x=0.5) and indium phosphides substrates up to a thickness of 0.3 micrometer. Reflection high energy electron diffraction (RHEED) observations and x-ray measurements show that even at very small lattice mismatch, single crystal Ge(1-x)Sn(x) films cannot be grown thicker than 0.3 micrometer. Our x-ray results suggest that the critical thickness of alpha-Sn and Ge(1-x)Sn(x) single crystal films is mainly determined by a phase transition mechanism, and the dislocation generation equivalent critical thickness is an overestimate. Under practical MBE growth conditions, it is very difficult to grow thick films, due to the sensitivity of the critical thickness to composition fluctuations. We have shown that even under an exact lattice match between substrate and film, the critical film thickness is limited. Keywords: Metastable alloys; Single crystals; Germanium; Antimony; X-Ray diffraction; Aluminum; Gallium; Tin; Surface structure; Infrared detectors. (jg).







The Fabrication and Characterization of Ion-implanted Germanium-incorporated Silicon-carbide Diodes and Transistors


Book Description

The unique material properties of Silicon-Carbide (SiC) make it a superior choice over Silicon or Gallium-Arsenide for applications in power electronics. Unfortunately, SiC semiconductor technology was only developed in recent years and its processes are still immature. Additionally, proper lattice matched compatible elements and alloy materials are rare, which gives other wide-bandgap materials, such as Gallium-Nitride, dominance. Furthermore, the well-established standard CMOS processes can not be applied to SiC in all cases. Finding proper complementary elements and alloys could bring SiC into competition with other wide-bandgap materials again. This thesis describes the incorporation of Germanium (Ge) in SiC as a way of bandgap engineering. Alloying with Germanium is believed to lower the bandgap of SiC, therefore using it to create heterojunction devices. I will introduce Ge-alloyed SiC heterojunction diodes, transistors and Schottky-barrier diodes, and address its advantages over their isomaterial devices. The design of the above mentioned devices will be reported, as well as all fabrication steps. Finally, a thorough analysis and evaluation will be concluded based on device measurements.




JJAP


Book Description




Physics Briefs


Book Description