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Ceramic Thick Films for MEMS and Microdevices

Author : Robert A. Dorey

Publisher : William Andrew

Page : 217 pages

File Size : 14,85 MB

Release : 2011-10-21

Category : Technology & Engineering

ISBN : 1437778178

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Book Description

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups Written by a single author, this book provides a clear, coherently written guide to this important emerging technology Covers materials, fabrication and applications in one book





Grain engineering of high energy density BaTiO3 thick films integrated on Si

Author : Jun Ouyang

Publisher : OAE Publishing Inc.

Page : 10 pages

File Size : 16,41 MB

Release : 2023-06-13

Category : Technology & Engineering

ISBN :

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Book Description

Ferroelectric (FE) ceramics with a large relative dielectric permittivity and a high dielectric strength have the potential to store or supply electricity of very high energy and power densities, which is desirable in many modern electronic and electrical systems. For a given FE material, such as the commonly-used BaTiO3, a close interplay between defect chemistry, misfit strain, and grain characteristics must be carefully manipulated for engineering its film capacitors. In this work, the effects of grain orientation and morphology on the energy storage properties of BaTiO3 thick films were systematically investigated. These films were all deposited on Si at 500 °C in an oxygen-rich atmosphere, and their thicknesses varied between ~500 nm and ~2.6 μm. While a columnar nanograined BaTiO3 film with a (001) texture showed a higher recyclable energy density Wrec (81.0 J/cm3vs. 57.1 J/[email protected] MV/cm, ~40% increase) than that of a randomly-oriented BaTiO3 film of about the same thickness (~500 nm), the latter showed an improved energy density at a reduced electric field with an increasing film thickness. Specifically, for the 1.3 μm and 2.6 μm thick polycrystalline films, their energy storage densities Wrec reached 46.6 J/cm3 and 48.8 J/cm3 at an applied electric field of 2.31 MV/cm (300 V on 1.3 μm film) and 1.77 MV/cm (460 V on 2.6 μm film), respectively. This ramp-up in energy density can be attributed to increased polarizability with a growing grain size in thicker polycrystalline films and is desirable in high pulse power applications.



Ceramic Materials

Author : C. Barry Carter

Publisher : Springer Science & Business Media

Page : 727 pages

File Size : 39,58 MB

Release : 2007-10-23

Category : Technology & Engineering

ISBN : 0387462716

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Book Description

Ceramic Materials: Science and Engineering is an up-to-date treatment of ceramic science, engineering, and applications in a single, integrated text. Building on a foundation of crystal structures, phase equilibria, defects and the mechanical properties of ceramic materials, students are shown how these materials are processed for a broad diversity of applications in today's society. Concepts such as how and why ions move, how ceramics interact with light and magnetic fields, and how they respond to temperature changes are discussed in the context of their applications. References to the art and history of ceramics are included throughout the text. The text concludes with discussions of ceramics in biology and medicine, ceramics as gemstones and the role of ceramics in the interplay between industry and the environment. Extensively illustrated, the text also includes questions for the student and recommendations for additional reading. KEY FEATURES: Combines the treatment of bioceramics, furnaces, glass, optics, pores, gemstones, and point defects in a single text Provides abundant examples and illustrations relating theory to practical applications Suitable for advanced undergraduate and graduate teaching and as a reference for researchers in materials science Written by established and successful teachers and authors with experience in both research and industry





Chemical Solution Deposition of Functional Oxide Thin Films

Author : Theodor Schneller

Publisher : Springer Science & Business Media

Page : 801 pages

File Size : 18,26 MB

Release : 2014-01-24

Category : Technology & Engineering

ISBN : 3211993118

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Book Description

This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.







Printed Films

Author : Maria Prudenziati

Publisher : Elsevier

Page : 609 pages

File Size : 32,80 MB

Release : 2012-08-30

Category : Technology & Engineering

ISBN : 0857096214

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Book Description

Whilst printed films are currently used in varied devices across a wide range of fields, research into their development and properties is increasingly uncovering even greater potential. Printed films provides comprehensive coverage of the most significant recent developments in printed films and their applications.Materials and properties of printed films are the focus of part one, beginning with a review of the concepts, technologies and materials involved in their production and use. Printed films as electrical components and silicon metallization for solar cells are discussed, as are conduction mechanisms in printed film resistors, and thick films in packaging and microelectronics. Part two goes on to review the varied applications of printed films in devices. Printed resistive sensors are considered, as is the role of printed films in capacitive, piezoelectric and pyroelectric sensors, mechanical micro-systems and gas sensors. The applications of printed films in biosensors, actuators, heater elements, varistors and polymer solar cells are then explored, followed by a review of screen printing for the fabrication of solid oxide fuel cells and laser printed micro- and meso-scale power generating devices.With its distinguished editors and international team of expert contributors, Printed films is a key text for anyone working in such fields as microelectronics, fuel cell and sensor technology in both industry and academia. - Provides a comprehensive analysis of the most significant recent developments in printed films and their applications - Reviews the concepts, properties, technologies and materials involved in the production and use of printed films - Analyses the varied applications of printed films in devices, including printed restrictive sensors for physical quantities and printed thick film mechanical micro-systems (MEMS), among others



Photoenergy and Thin Film Materials

Author : Xiao-Yu Yang

Publisher : John Wiley & Sons

Page : 636 pages

File Size : 36,62 MB

Release : 2019-03-19

Category : Science

ISBN : 1119580471

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Book Description

This book provides the latest research & developments and future trends in photoenergy and thin film materials—two important areas that have the potential to spearhead the future of the industry. Photoenergy materials are expected to be a next generation class of materials to provide secure, safe, sustainable and affordable energy. Photoenergy devices are known to convert the sunlight into electricity. These types of devices are simple in design with a major advantage as they are stand-alone systems able to provide megawatts of power. They have been applied as a power source for solar home systems, remote buildings, water pumping, megawatt scale power plants, satellites, communications, and space vehicles. With such a list of enormous applications, the demand for photoenergy devices is growing every year. On the other hand, thin films coating, which can be defined as the barriers of surface science, the fields of materials science and applied physics are progressing as a unified discipline of scientific industry. A thin film can be termed as a very fine, or thin layer of material coated on a particular surface, that can be in the range of a nanometer in thickness to several micrometers in size. Thin films are applied in numerous areas ranging from protection purposes to electronic semiconductor devices. The 16 chapters in this volume, all written by subject matter experts, demonstrate the claim that both photoenergy and thin film materials have the potential to be the future of industry.