ULSI Process Integration 7
Author : C. Claeys
Publisher : The Electrochemical Society
Page : 429 pages
File Size : 15,33 MB
Release : 2011
Category :
ISBN : 1607682613
ULSI Process Integration
Author : Cor L. Claeys
Publisher : The Electrochemical Society
Page : 408 pages
File Size : 10,23 MB
Release : 1999
Category : Computers
ISBN : 9781566772419
Book Description
ULSI Process Integration 6
Author : C. Claeys
Publisher : The Electrochemical Society
Page : 547 pages
File Size : 45,88 MB
Release : 2009-09
Category : Integrated circuits
ISBN : 1566777445
Book Description
ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
ULSI Process Integration 5
Author : Cor L. Claeys
Publisher : The Electrochemical Society
Page : 509 pages
File Size : 40,12 MB
Release : 2007
Category : Integrated circuits
ISBN : 1566775728
Book Description
The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.
ULSI Process Integration 9
Author : C. Claeys
Publisher : The Electrochemical Society
Page : 335 pages
File Size : 43,89 MB
Release : 2015
Category :
ISBN : 1607686759
Book Description
ULSI Process Integration III
Author : Electrochemical Society. Meeting
Publisher : The Electrochemical Society
Page : 620 pages
File Size : 36,49 MB
Release : 2003
Category : Technology & Engineering
ISBN : 9781566773768
Book Description
ULSI Science and Technology, 1989
Author : C. M. Osburn
Publisher :
Page : 804 pages
File Size : 30,11 MB
Release : 1989
Category : Integrated circuits
ISBN :
Book Description
SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices
Author : D. Harame
Publisher : The Electrochemical Society
Page : 1042 pages
File Size : 36,51 MB
Release :
Category :
ISBN : 1607685434
Book Description
ULSI Process Integration II
Author : Cor L. Claeys
Publisher : The Electrochemical Society
Page : 636 pages
File Size : 29,8 MB
Release : 2001
Category : Technology & Engineering
ISBN : 9781566773089
Book Description
SiGe, Ge, and Related Compounds 4: Materials, Processing, and Devices
Author : D. Harame
Publisher : The Electrochemical Society
Page : 1066 pages
File Size : 29,76 MB
Release : 2010-10
Category : Science
ISBN : 1566778255
Book Description
Advanced semiconductor technology is depending on innovation and less on "classical" scaling. SiGe, Ge, and Related Compounds has become a key component in the arsenal in improving semiconductor performance. This symposium discusses the technology to form these materials, process them, FET devices incorporating them, Surfaces and Interfaces, Optoelectronic devices, and HBT devices.
