Ultra-shallow Junction Formation
Author : Hong-jyh Li
Publisher :
Page : pages
File Size : 37,76 MB
Release : 2002
Category : Boron compounds
ISBN :
Ultra-shallow Junction Formation Using Silicide as a Diffusion Source and Low Thermal Budget
Author : Q. F. Wang
Publisher :
Page : 35 pages
File Size : 43,80 MB
Release : 1991
Category : Integrated circuits
ISBN :
Book Description
Novel Methods for Low Resistance Ultra-shallow Junction Formation
Author : Sameer H. Jain
Publisher :
Page : 166 pages
File Size : 34,28 MB
Release : 2005
Category :
ISBN :
Book Description
Ultra Shallow Junction Formation Technologies and Device Design for Deep Sub-micron Generation
Author : Akio Shima
Publisher :
Page : 155 pages
File Size : 49,93 MB
Release : 2008
Category :
ISBN :
Book Description
Ultra Shallow Junction Formation Using Diffusion from Silicides
Author : H. Jiang
Publisher :
Page : 15 pages
File Size : 35,65 MB
Release : 1990
Category : Diffusion
ISBN :
Book Description
Effects of Preamorphizing Ion Mass on Ultra-shallow Junction Formation
Author : Mark H. Clark
Publisher :
Page : 196 pages
File Size : 23,13 MB
Release : 2001
Category :
ISBN :
Book Description
Microwave annealing for ultra-shallow junction formation
Author : Taras Alexandrovich Kirichenko
Publisher :
Page : 52 pages
File Size : 47,79 MB
Release : 2002
Category :
ISBN :
Book Description
Impact of Spike Anneal on Ultra Shallow Junction Formation
Author : Chung Woh Lai
Publisher :
Page : 94 pages
File Size : 26,99 MB
Release : 2002
Category :
ISBN :
Book Description
Diffusion and Precipitation Models for Silicon Gettering and Ultra Shallow Junction Formation
Author : Hsiu-Wu Guo
Publisher :
Page : 143 pages
File Size : 24,7 MB
Release : 2008
Category : Semiconductors
ISBN :
Book Description
Advances in Rapid Thermal Processing
Author : Fred Roozeboom
Publisher : The Electrochemical Society
Page : 470 pages
File Size : 31,79 MB
Release : 1999
Category : Technology & Engineering
ISBN : 9781566772327
